Synthesis of anatase-type TiO₂ films by reactive laser ablation of a metallic Ti target in ambient O₂ gas

Abstract

TiO₂ films having anatase-type crystal structures were synthesized by reactive laser ablation of a metallic Ti target in ambient O₂ gas. The anatase-type TiO₂ was obtained at O₂ pressures below 0.2 Torr and at substrate temperatures above 150 °C. The films had the (101) orientation at substrate temperatures of 200–250 °C while, at substrate temperatures of 400–450 °C, the orientation of the films was (004). Rutile-type crystal was mixed in at substrate temperatures higher than 450 °C. The synthesis characteristics were compared with the fluxes of Ti, Ti⁺, and TiO toward the substrate, which were evaluated by laser-induced fluorescence imaging spectroscopy.