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Reverse analysis on the geometric errors of ultra-precision machine

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Abstract

Ultra-precision machine errors are generally carried out by laser interferometer measurement preliminary, and then, judgment is further made by trial cutting parts. The applications are limited due to its high cost and the unavailable measurement data in the non-open source ultra-precision machines. Meanwhile, the machining parts are lack of an arithmetic that tells the main errors of the processing. This article first analyzes the specific forms of machine errors, and the model of geometric errors has been simplified based on the dynamics of multibody systems theory. On the basis of the coupling geometric errors, specific shapes are used to reverse calculate errors, and the result could predict the processing conditions in different free form surfaces. The accuracy of reverse calculation model is verified by experiments.

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Correspondence to Xiaodong Zhang.

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Gao, H., Fang, F. & Zhang, X. Reverse analysis on the geometric errors of ultra-precision machine. Int J Adv Manuf Technol 73, 1615–1624 (2014). https://doi.org/10.1007/s00170-014-5931-3

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  • DOI: https://doi.org/10.1007/s00170-014-5931-3

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