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Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy

  • Plasma Technology
  • Published:
Czechoslovak Journal of Physics Aims and scope

Abstract

Applications of plasma sources in technology, medicine and biomedicine are already known for a longer time. Our work is focused on diagnostics and applications of a microwave plasma source in these areas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at 2.45 GHz in the output power range (0 ÷ 300) W, which creates plasma from the working gas flowing through the quartz nozzle. We present results of diagnostics of generated plasma at nozzle exit at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double Langmuir probe measurement and optical emission spectroscopy.

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Authors and Affiliations

  1. Department of Physics, University of South Bohemia, Jeronýmova 10, 371 15, České Budějovice, Czech Republic

    V. Straňák, P. Adámek, M. Tichý & P. Špatenka

  2. Department of Physical Electronics, Masaryk University, Kotlářská 2, 611 37, Brno, Czech Republic

    P. Slavíček, Z. Navrátil & D. Trunec

  3. Faculty of Mathematics and Physics, Charles University in Prague, V Holešovičkách 2, 180 00, Praha 8, Czech Republic

    V. Straňák, P. Adámek & M. Tichý

  4. Department of Material Engineering, Technical University of Liberec, Hálkova 6, 461 17, Liberec, Czech Republic

    P. Špatenka

Authors
  1. V. Straňák
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  2. P. Adámek
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  3. M. Tichý
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  4. P. Špatenka
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  5. P. Slavíček
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  6. Z. Navrátil
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  7. D. Trunec
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  8. V. Straňák
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  9. P. Adámek
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  10. M. Tichý
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  11. P. Špatenka
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Straňák, V., Adámek, P., Tichý, M. et al. Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy. Czech. J. Phys. 54 (Suppl 3), C970 (2004). https://doi.org/10.1007/BF03166516

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  • DOI: https://doi.org/10.1007/BF03166516

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