Abstract
In this work, the probe system developed by us earlier for plasma diagnostics under the conditions of plasma polymerization and synthesis of carbon nanostructures was constructively developed. The probe system is supplemented with a block that allows cleaning the probe with ion current, as well as obtaining the second derivative of the probe current-voltage characteristic by the harmonic method. The probe system was tested on the example of plasma diagnostics in a mixture of He + 0.1% CH4.
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REFERENCES
Demidov, V.I., Kolokolov, N.B., and Kudryavtsev, A.A., Zondovye metody issledovaniya nizkotemperaturnoi plazmy (Probe Methods in Low-Temperature Plasma Research), Moscow: Energoatomizdat, 1996.
Ivanov, Yu.A., Lebedev, Yu.A., and Polak, L.S., Metody kontaktnoi diagnostiki v neravnovesnoi plazmokhimii (Contact Diagnostics Methods in Nonequilibrium Plasma Chemistry) Moscow: Nauka, 1981.
Godyak, V.A. and Alexandrovich, B.M., J. Appl. Phys., 2015, vol. 118, p. 233302.
Yuan, C., Kudryavtsev, A.A., Saifutdinov, A.I., Sysoev, S.S., Tian. R., Yao, J., and Zhou, Z., IEEE Trans. Plasma Sci., 2017, vol. 45, no. 12, p. 3110.
Tsendin, L.D., Plasma Sources Sci. Technol., 1995, vol. 4, no. 2, p. 200.
Kudryavtsev, A., Pramatarov, P., Stefanova, M., and Khromov, N., J. Instrum., 2012, vol. 7, p. 07002.
Kudryavtsev, A.A., Saifutdinov, A.I., Stefanova, M.S., Pramatarov, P., and Sysoev, S.S, Phys. Plasmas, 2017, vol. 24, no. 5, p. 054507.
Yuan, C., Kudryavtsev, A.A., Saifutdinov, A.I., Sysoev, S.S., Stefanova, M.S., Pramatarov, P.M., and Zhou, Z., Phys. Plasmas, 2018, vol. 25, no. 10, p. 104501.
Saifutdinov, A.I. and Sysoev, S.S., Plasma Sources Sci. Technol., 2021, vol. 30, p. 017001.
Zhou, C., Yao, J., Saifutdinov, A.I., Kudryavtsev, A.A., and Yuan, C., Plasma Sources Sci. Technol., 2021, vol. 30, no. 11, p. 117001.
Zhou, C., Yao, J., Saifutdinov, A.I., Kudryavtsev, A.A., Yuan, C., Ma, G., Dou, Z., Cao, J., Ma, M., and Zhou, Z., Plasma Sources Sci. Technol., 2022, vol. 31, p. 107001.
www.plasmasensors.com
www.impedans.com/products/langmuir-probe
www.hidenanalytical.com/products/thin-films-plasma-and-surface-engineering/espion
Kimura, T. and Ohe, K., Plasma Sources Sci. Technol., 1999, vol. 8, p .553.
Rudenko, K.V., Myakon’kikh, A.V., Orlikovsky, A.A., and Pustovit, A.N., Russ. Microelectron., 2007, vol. 36, no. 1, p. 14.
Rudenko, K.V., Myakon’kikh, A.V., and Orlikovsky, A.A., Russ. Microelectron., 2007, vol. 36, no. 3, p. 179.
Saifutdinov, A.I. and Sysoev, S.S., Instrum. Exp. Tech., 2022, vol. 65, no. 1, pp. 75–79.
Timerkaev, B.A., Kaleeva, A.A., Timerkaeva, D.B., and Saifutdinov, A.I., High Energy Chem., 2019, vol. 53, p. 390.
Fairushin, I.I., Vasiliev, M.M., and Petrov, O.F., Molecules, 2021, vol. 26, p. 6974.
Timerkaev, B.A., Ahmetov, M.M., Zalyaliev, B.R., Petrova, O.A., and Israfilov, D.I., J. Phys.: Conf. Ser., 2014, vol. 567, no. 1, p. 012036.
Saifutdinov, A.I., Saifutdinova, A.A., and Timerkaev, B.A., Plasma Phys. Rep., 2019, vol. 44, p. 359.
Shemakhin, A.Y., Zheltukhin, V.S., Shemakhin, E.Y., Terentev, T.N., and Sofronitsky, A.O., J. Phys.: Conf. Ser., 2020, vol. 1588, no. 1, p. 012018.
Budilov, V.V., Ramazanov, K.N., Zolotov, I.V., Khucnutdinov, R.F., and Starovoitov, S.V., J. Eng. Sci. Technol. Rev., 2015, vol. 8, no. 6, p. 22.
Moskvina, V.A., Astafurova, E.G., Ramazanov, K.N., Maier, G.G., Astafurov, S.V., Melnikov, E.V., and Mironov, Y.P., Mater. Charact., 2019, vol. 153, p. 372.
Budilov, V.V., Ramazanov, K.N., and Vafin, R.K., Met. Sci. Heat Treat., 2011, vol. 53, nos. 7–8, p. 347.
Budilov, V.V., Ramazanov, K.N., Zolotov, I.V., Khusainov, Y.G., and Vardanyan, E.L., J. Phys.: Conf. Ser., 2017, vol. 830, no. 1, p. 012094.
Tazmeev, K.K. and Tazmeev, A.K., Heat Transfer Res., 2005, vol. 36, no. 8.
Miftakhov, M.N., Tazmeev, K.K., Tazmeev, A.K., and Fridland, S.V., J. Eng. Phys. Thermophys., 2006, vol. 79, no. 3, p. 532.
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The research was carried out with the support of the Russian Science Foundation and the Cabinet of Ministers of the Republic of Tatarstan within the framework of the scientific project no. 22-22-20099.
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Saifutdinov, A.I., Sysoev, S.S. & Gushchin, D.D. Development of a Probe System for Measuring Plasma Parameters under Conditions of Plasma Polymerization and Synthesis of Nanostructures. High Energy Chem 57 (Suppl 1), S172–S177 (2023). https://doi.org/10.1134/S0018143923070378
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DOI: https://doi.org/10.1134/S0018143923070378