Skip to main content
Log in

H atom plasma diagnostics: A sensitive probe of temperature and purity

  • Published:
Plasma Chemistry and Plasma Processing Aims and scope Submit manuscript

Abstract

Two-photon absorption laser-induced fluorescence (TALIF) has proven to be a convenient diagnostic for reactive light atoms in plasmas. We have carried out a series of TALIF experiments and report the first temperature measurements of ground state H atoms in an rf discharge. With reasonable care, measurements of the H atom linewidths, broadened by the Doppler effect, provide detailed information about the translational energy, i.e., temperature of the atoms. It is found that in pure H2 plasmas, the H atom temperature is slighthy elevated with respect to ambient. In plasmas contaminated with the other H-containing molecules, Doppler-broadened linewidths corresponding to H atom temperatures in excess of 7000 K have been observed. The mechanisms leading to such high apparent temperatures are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. G. S. Selwyn, L. D. Baston, and H. H. Sawin,Appl. Phys. Lett. 55, 898 (1987).

    Google Scholar 

  2. S. G. Hansen, G. Luckman, G. C. Nieman, and S. D. Colson,Appl. Phys. Lett. 51, 898 (1987).

    Google Scholar 

  3. H. J. Boker, R. R. Freeman, J. C. Whitehead, and R. H. Stortz,Phys. Rev. A 24, 612 (1981).

    Google Scholar 

  4. W. Bischel, B. Perry, and D. Crosley,Chem. Phys. Lett. 82, 85 (1981).

    Google Scholar 

  5. M. Alden, A. Edner, P. Groptrom, and S. Svanberg,Opt. Comm. 42, 244 (1982).

    Google Scholar 

  6. P. Brewer, N. Van Neen, and R. Bersohn,Chem. Phvs. Lett. 91, 126 (1982).

    Google Scholar 

  7. M. Heaven, T. A. Miller, R. R. Freeman, J. White, and J. Boker,Chem. Phys. Lett. 86, 458 (1982).

    Google Scholar 

  8. L. F. DiMauro, R. A. Gottscho, and T. A. Miller,J. Appl. Phys. 56, 2007 (1984).

    Google Scholar 

  9. B. L. Preppernau, D. A. Dolson, R. A. Gottscho, and T. A. Miller,Plasma Chem. Plasma Process.9, 157 (1989).

    Google Scholar 

  10. A. L. Cappelli, R. A. Gottscho, and T. A. Miller,Plasma Chem. Plasma Process.5, 317 (1985).

    Google Scholar 

  11. M. D. Harmony,Introduction to Molecular Energies and Spectra, Holt, Rinehart, and Winston, New York (1972).

    Google Scholar 

  12. R. S. Freund, J. A. Schiavone, and D. F. Biader,J. Chem. Phys. 64, 1122 (1976).

    Google Scholar 

  13. J. A. Schiavone, K. C. Smyth, and R. S. Freund,J. Chem. Phys. 63, 1043 (1975).

    Google Scholar 

  14. T. Ogawa, J. Kurawaki, and M. Higo,Chem. Phys. 61, 181 (1981).

    Google Scholar 

  15. M. Higo, S. Kaurata, and T. Ogawa,Chem. Phys. 66, 243 (1982).

    Google Scholar 

  16. B. L. Preppernau and T. A. Miller,J. Vac. Sci. Technol. A 8, 1673 (1990).

    Google Scholar 

  17. R. A. Gottscho, G. R. Scheller, D. Stoneback, and T. Intrator,J. Appl. Phys. 66, 492 (1989).

    Google Scholar 

  18. H. R. Greim,Spectral Line Broadening by Plasmas, Academic Press, New York, (1974).

    Google Scholar 

  19. V. M. Donnelly, D. L. Flamm, and G. Collins,J. Vac. Sci. Technol. 21, 817 (1982).

    Google Scholar 

  20. R. A. Back and S. Koda,Can. J. Chem. 55, 1387 (1977).

    Google Scholar 

  21. H. Uyama and O. Matsumoto,Plasma Chem. Plasma Process.9, 421 (1989).

    Google Scholar 

  22. J. Segall, R. Lavi, Y. Wen, and C. Wittig,J. Phys. Chem. 93, 7287 (1989).

    Google Scholar 

  23. T. A. Miller,CHEMTRACTS—Anal., Phys., Inorg. Chem. 2, 187 (1990).

    Google Scholar 

  24. G. Herzberg,Electronic Spectra of Polyatomic Molecules, (Van Nostrand Reinhold., Cincinnati, (1966).

    Google Scholar 

  25. D. F. McMillen and D. M. Golden,Annu. Rev. Phys. Chem. 88, 493 (1982).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Dunlop, J.R., Tserepi, A.D., Preppernau, B.L. et al. H atom plasma diagnostics: A sensitive probe of temperature and purity. Plasma Chem Plasma Process 12, 89–101 (1992). https://doi.org/10.1007/BF01447946

Download citation

  • Received:

  • Revised:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01447946

Key words

Navigation