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Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI)

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Zeitschrift für Physik D Atoms, Molecules and Clusters

Abstract

Langevin Molecular Dynamics Simulations have been performed in order to understand thin film formation by impact of energetic clusters. The impact of Mo1024 clusters on a Mo surface is simulated at kinetic energies between 1 and 10 eV per atom. The results are in qualitative agreement with the experiments. Due to the high temperature induced locally at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.

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Authors and Affiliations

  1. Freiburger Materialforschungszentrum and Fakultät für Physik, Universität Freiburg, H. Herderstr. 3, D7800, Freiburg, Germany

    Hellmut Haberland & Michael Moseler

  2. Kazakh Polytechnical Institute, Alma Ata, Kazachstan

    Zinetulla Insepov

Authors
  1. Hellmut Haberland
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  2. Zinetulla Insepov
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  3. Michael Moseler
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Haberland, H., Insepov, Z. & Moseler, M. Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI). Z Phys D - Atoms, Molecules and Clusters 26, 229–231 (1993). https://doi.org/10.1007/BF01429153

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  • DOI: https://doi.org/10.1007/BF01429153

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