Abstract
High-T c superconducting thin films of Bi−Sr−Ca−Cu oxides were prepared by laser-induced plasma deposition of high-T c superconducting Bi2Sr2Ca1Cu2Ox and Bi2Sr2Ca2Cu3Ox targets in vacuum and a short post-annealing in air at 875°C. Thin films (thickness <500 nm) with a critical temperatureT c -onset of 95 K can be prepared on silicon substrate material with a SrTiO3 interface layer. The thin films were completely superconducting between 80 and 90 K. The stoichiometry transfer of superconducting target material by laser-induced plasma deposition was investigated.
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Dietze, H.J., Becker, S. & Hirsch, D. High-T c superconducting Bi−Sr−Ca−Cu−O thin films prepared by laser-induced plasma deposition. Z. Physik B - Condensed Matter 78, 361–365 (1990). https://doi.org/10.1007/BF01313316
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DOI: https://doi.org/10.1007/BF01313316