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Construction of Nano Manufacturing World

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Abstract

In order to open a nanometer region to humans, we introduce a working system newly designed, namely, “Nano Manufacturing World (NMW)”. We are designing the NMW through the following sequence: definition of required performance, analysis for functional elements, proposal of mechanism elements, development of structural elements and synthesis of total structure. Analyzing some future applications of NMW in the fields of information technology, medical science, micro mechanics etc., we clarified that preciseness and 3-dimensionality are important for NMW. To satisfy them, we applied a new fused process of semiconductor processing and normal machine processing. We introduced prototypical mechanism elements, results of their trials for nano manufacturing and the direction of future NMW.

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Authors and Affiliations

  1. Dept. of Engineering Synthesis, Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, 113, Tokyo, Japan

    Y. Hatamura & M. Nakao

  2. Research Center for Advanced Sci. and Tech., Univ. of Tokyo, 4-6-1 Komaba, Meguro-ku, 153, Tokyo, Japan

    T. Sato

Authors
  1. Y. Hatamura
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  2. M. Nakao
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  3. T. Sato
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Hatamura, Y., Nakao, M. & Sato, T. Construction of Nano Manufacturing World. Microsystem Technologies 1, 155–162 (1995). https://doi.org/10.1007/BF01294809

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  • DOI: https://doi.org/10.1007/BF01294809

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