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Stability to moisture for chemically vapour-deposited boron nitride

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Abstract

Chemically vapour-deposited boron nitride (CVD-BN) plates prepared by use of the BCl3-NH3-H2 gas system were investigated as to their stability to moisture. Infrared (IR) spectroscopic measurement, chemical analysis and thermal gravimetric analysis were used in this study. The synthesis conditions of CVD-BN plates have a large influence on their stability to moisture. The stability of CVD-BN plates prepared under a total gas pressure (P tot) of 10 to 60 torr degraded as the deposition temperature (T dep) was lowered. The CVD-BN plates with transparent and isotropic properties, which were prepared at below 1400° C and above 10 torr, showed poor stability to moisture, The CVD-BN plates synthesized under 5 torr had high moisture-resistance, even at aT dep as low as 1400° C. An IR absorption spectral study revealed that the unstable species existing in CVD-BN plans had changed to ammonium borate hydrates by reacting with moisture in the atmosphere. The stability to moisture for CVD-BN plates degraded as the deposition roe was raked, especially for the CVD-BN plates prepared at 1400° C.

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  1. Japan Metals and Chemicals Co. Ltd, 1719 Ohmama, 376-01, Yamada-gun, Gunma, Japan

    T. Matsuda

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  1. T. Matsuda
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Matsuda, T. Stability to moisture for chemically vapour-deposited boron nitride. J Mater Sci 24, 2353–2357 (1989). https://doi.org/10.1007/BF01174496

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  • DOI: https://doi.org/10.1007/BF01174496

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