Abstract
The yields of SOF4, SO2F2, SOF2, and SO2 have been measured as a function of O2 content in SF6/O2 mixtures, following spark discharges. All experiments were made at a spark energy of 8.7 J/spark, a total pressure of 133 kPa, and for O2 additions of 0, 1, 2, 5, 10, and 20% to SF6. Even for the case of no added O2, trace amounts of O2 and H2O result in the formation of the above by-products. However, addition of O2 significantly increases the yields of SOF4 and SO2F2, while SOF2 is only slightly affected. The net yields for SOF4 and SO2F2 formation range from 0.18×10−9 and 0.64×10−10 mol·J−1, respectively, at 1% O2 content to 10.45×10−9 and 7.15×10−10 mol·J−1, respectively, at 20% O2 content. The mechanism for SOF4 production appears to involve SF4, an important initial product of SF6, as a precursor. Comparison of the SOF4 and SO2F2 yield from spark discharges (arc and corona) shows that the yields from other discharges (arc and corona) shows that the yields can vary by at least three orders of magnitude, depending on the type of discharge and on other discharge parameters.
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Sauers, I. By-product formation in spark breakdown of SF6/O2 mixtures. Plasma Chem Plasma Process 8, 247–262 (1988). https://doi.org/10.1007/BF01016160
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DOI: https://doi.org/10.1007/BF01016160