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Time-dependent solution of Boltzmann equation in rf plasmas: A comparison with the effective field approximation

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Abstract

Electron isotropic distribution function (idf) and related quantities in rf plasmas (CO, H2, Ne), calculated by solving the time-dependent Boltzmann equation, are compared with the corresponding values obtained by using the effective field approximation (efa). We show that the agreement between the two methods depends on the ratio between the applied field frequency and the lumped frequencies for impulse and energy dissipation. In fact, only at moderately high field frequencies are results obtained according to efa comparable with the corresponding ones obtained by the time-dependent solution and subsequent time averaging, while in the other cases differences up to two orders of magnitude are observed.

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Authors and Affiliations

  1. Zentralinstitut für Elektronenphysik, AdW, Institutsteil V, Gasentladungsphysik “Rudolf Seeliger”, 2200, Griefswald, DDR

    R. Winkler & J. Wilhelm

  2. Centro di Studio per la Chimica dei Plasmi del C.N.R. and Dipartimento di Chimica dell'Università, Via G. Amendola 173, 70126, Bari, Italy

    M. Dilonardo & M. Capitelli

Authors
  1. R. Winkler
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  2. M. Dilonardo
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  3. M. Capitelli
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  4. J. Wilhelm
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Winkler, R., Dilonardo, M., Capitelli, M. et al. Time-dependent solution of Boltzmann equation in rf plasmas: A comparison with the effective field approximation. Plasma Chem Plasma Process 7, 125–137 (1987). https://doi.org/10.1007/BF01016003

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  • DOI: https://doi.org/10.1007/BF01016003

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