Abstract
The atomic mixing due to a knock-on cascade has much influence on the depth resolution of ion probe microanalysis. The preliminary experimental results support the assumption that the depth resolution due to this effect is determined by the competition of sputtering rate and creation rate of atomic displacement.
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References
C.A. Evans, Jr.: Anal. Chem.44, 67A (1972)
A. Benninghoven: Surface Sci.35, 427 (1973)
H.W. Werner, H.A.M. DeGrefte: Surface Sci.35, 458 (1973)
T. Ishitani, R. Shimizu: Appl. Phys.6, 241 (1975)
H. Tamura, T. Kondo, T. Hirano: In Proc. 6th Intern. Conf. X-ray Optics and Microanalysis, Ed. by G. Shinoda, K. Kohra, and T. Ichinokawa (Univ. of Tokyo Press, Tokyo, 1972) p. 423
H. Tamura, T. Kondo, H. Doi: Adv. Mass Spectrometry5, 441 (1968)
L. Young: Proc. Roy. Soc. A244, 41 (1958)
C.A. Evans, Jr., J.P. Pemsler: Anal. Chem.42, 1060 (1970)
H. Tamura, T. Kondo, T. Hirano, K. Nakamura, K. Nakajima, T. Noda: American Society for Mass Spectrometry 21st Annual Conference on Mass Spectrometry and Applied Topics (1973)
R. Kelly, N.Q. Lam: Rad. Effects19, 39 (1973)
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Ishitani, T., Shimizu, R. & Tamura, H. Atomic mixing in ion probe microanalysis. Appl. Phys. 6, 277–279 (1975). https://doi.org/10.1007/BF00883764
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DOI: https://doi.org/10.1007/BF00883764