Abstract
When an accelerated electron strikes a substance, it sometimes ejects the inner shell electron of the atom existing in the substance and creates a vacancy. This phenomenon is called electron beam excitation.
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Sakamae, H. (2018). Electron Probe Microanalysis. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_24
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DOI: https://doi.org/10.1007/978-981-10-6156-1_24
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