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Development of a general surface contour by ion erosion. Theory and computer simulation

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Abstract

An analytical treatment of the development of a general contour under ion bombardment is proposed. The derived equations relate the properties of the eroded material through its yield variation upon the angle of incidence,S (θ). New specific angles (θs 1 andθs 2) are introduced which limit regions where the evolution process of the surface may be different. The theory allows prediction of the number of angular points which will appear in each region.

A computer simulation program is used to describe the evolution of sine-type surfaces. With infinite time, such profiles in relief above a horizontal plane, tend towards the steady state which exists in a horizontal plane. The model is compared to one previously described.

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Ducommun, J.P., Cantagrel, M. & Marchal, M. Development of a general surface contour by ion erosion. Theory and computer simulation. J Mater Sci 9, 725–736 (1974). https://doi.org/10.1007/BF00761792

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  • DOI: https://doi.org/10.1007/BF00761792

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