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Electron kinetics of weakly ionized collision-dominated RF plasmas in CO

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Abstract

Based on the nonstationary electron Boltzmann equation this paper deals with the time-resolved electron kinetics in the rf plasma in CO, i.e., with the calculation of the temporal evolution of the energy distribution and of the resultant macroscopic quantities for the established steady state. A particular aspect of this plasma is the distinctly resonance-like behavior of the vibrational excitation of the CO molecules by electron collisions. This causes the lumped frequencies for energy and impulse dissipation in collisions, recently introduced in the study of the rf kinetics in Ne and H2, to become extremely dependent on the electron energy. Despite this fact, it could be verified that the field frequency dependence of the temporal evolution of the electron kinetics can be interpreted by means of these two dissipation frequencies even under such complicated conditions as given by the atomic data in CO.

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Authors and Affiliations

  1. Zentralinstitut für Elektronenphysik, AdW, Institutsteil V Gasentladungsphysik “Rudolf Seeliger”, 2200, Greifswald, DDR

    R. Winkler & J. Wilhelm

  2. Centro di Studio per la Chimica dei Plasmi del C.N.R. and Dipartimento di Chimica dell'Università, Via G. Amendola 173, 70126, Bari, Italy

    M. Capitelli, M. Dilonardo & C. Gorse

Authors
  1. R. Winkler
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  2. M. Capitelli
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  3. M. Dilonardo
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  4. C. Gorse
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  5. J. Wilhelm
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Winkler, R., Capitelli, M., Dilonardo, M. et al. Electron kinetics of weakly ionized collision-dominated RF plasmas in CO. Plasma Chem Plasma Process 6, 437–456 (1986). https://doi.org/10.1007/BF00565555

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  • DOI: https://doi.org/10.1007/BF00565555

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