Skip to main content
Log in

Effect of ion implantation on the chemical composition and structure of surface layers of heat-resistant alloys

  • Published:
Russian Physics Journal Aims and scope

Abstract

We present a critical analysis of literature data devoted to the effect of ion implantation on the physicochemical state of surface layers of heat-resistant materials. We pay special attention to the problem of choosing the type of ions to be implanted, the bombardment conditions, and the finishing heat treatment with the goal of achieving the optimal level of operating properties. We show that for complex heterogeneous systems, the optimal treatment conditions can be estimated by methods of local equilibrium thermodynamics, chemical kinetics, and the theory of interaction of fast ions with solids using the basic principles of bulk alloying of heat-resistant alloys. We consider the characteristics features of continuous and pulsed implantation in heat-resistant materials. We formulate the requirements for techniques for investigating the chemical composition and the structural phase state of the near-surface regions of the bombarded targets. Analysis of the literature data on the effect of the bombardment conditions on the structure of the metals has shown that the data are ambiguous, that different authors use different terminology, and that the question of the phenomenology of the “long-range effect” is under dispute.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. A. M. Sulima, V. A. Shulov, and Yu. D. Yagodkin, The Surface Layer and Operating Properties of Machine Parts [in Russian], Mashinostroenie, Moscow (1988).

    Google Scholar 

  2. J. K. Hirvonen, Ion Implantation [Russian translation], Metallurgiya, Moscow (1985).

    Google Scholar 

  3. M. I. Guseva, Results of Science and Technology [in Russian], VINITI, Moscow (1989), Vol. 5, pp. 5–86.

    Google Scholar 

  4. Yu. D. Yagodkin, Results of Science and Technology [in Russian], VINITI, Moscow (1990), Vol. 24, pp. 167–221.

    Google Scholar 

  5. F. F. Komarov, Ion Implantation in Metals [in Russian], Metallurgiya, Moscow (1990).

    Google Scholar 

  6. Yu. D. Yagodkin and V. S. Terent'eva, Results of Science and Technology [in Russian], VINITI, Moscow (1991), Vol. 25, pp. 182–253.

    Google Scholar 

  7. V. A. Shulov, A. M. Sulima, Yu. D. Yagodkin, and V. V. Tetyukhin, Metalloved. Term. Obrab. Met., No. 8, 24–30 (1990).

  8. Yu. D. Yagodkin, V. A. Shulov, and A. M. Sulima, Metalloved. Term. Obrab. Met., No. 10, 38–43 (1989).

  9. V. A. Shulov, E. V. Zaitsev, and A. M. Sulima, Problemy Prochnosti, No. 12, 112–120 (1989).

  10. V. A. Shulov, A. É. Strygin, and A. M. Sulima, Trenie i Iznos, No. 5–6, 316–324 (1990).

  11. A. F. Burenkov, F. F. Komarov, M. A. Kumakhov, and M. M. Temkin, Tables of Spatial Distribution Parameters of Ion-Implanted Impurities [in Russian], BGU, Minsk (1980).

    Google Scholar 

  12. I. B. Levinson and D. L. Maslov, Poverkhnost', No. 4, 5–7 (1987).

  13. Yu. D. Lizunov and A. I. Ryazanov, Poverkhnost', No. 5, 121–131 (1987).

  14. V. S. Remizov, D. B. Rogozkin, and M. I. Ryazanov, Fluctuations in Ranges of Charged Particles [in Russian], Énergoatomizdat, Moscow (1988).

    Google Scholar 

  15. I. N. Evdokimov, Poverkhnost', No. 10, 5–18 (1989).

  16. Yu. D. Kornyushkin, Poverkhnost', No. 6, 63–70 (1992).

  17. F. E. Naumtsev and V. F. Volkov, Poverkhnost', No. 8, 155–157 (1990).

  18. A. F. Burenkov and F. F. Komarov, Poverkhnost', No. 1, 51–53 (1990).

  19. M. G. Stepanova, Poverkhnost;, No. 11, 19–25 (1991).

  20. A. F. Burenkov, A. G. Kurganov, and G. G. Konoplyanik, Poverkhnost', No. 8, 52–58 (1989).

  21. I. I. Vosilyus and L. I. Pranyavichyus, Poverkhnost', No. 7, 125–130 (1991).

  22. A. F. Burenkov, F. F. Komarov, and S. A. Fedotov, Poverkhnost', No. 6, 53–58 (1992).

  23. Yu. D. Kornyushkin, Poverkhnost', No. 7, 40–46 (1992).

  24. A. F. Burenkov, V. I. Bel'ko, E. B. Boiko, and I. E. Mozolevskii, Poverkhnost;, Nos. 10–11, 89–93 (1992).

  25. A. F. Burenkov, F. F. Komarov, and M. M. Temkin, Poverkhnost', No. 4, 15–21 (1989).

  26. A. B. Danilin, Poverkhnost;, No. 5, 132–136 (1989).

  27. I. A. Rovenskikh, A. D. Suprun, G. L. Fal'ko, and A. M. Fedorchenko, Fiz. i Khim. Obrab. Mater., No. 1, 5–10 (1989).

  28. Abstracts, First All-Union Conference on Modification of Properties of Construction Materials by Charged-Particle Beams, Tomsk, November 16–18 (1988) [in Russian], Tomsk (1988), Vol. 1; Vol. 2; Vol. 3.

  29. Abstracts, All-Union Conference on Ion-Beam Modification of Materials, Kaunas, May 16–17 (1989) [in Russian], Kaunas (1989).

  30. Abstracts, Second All-Union Conference on Modification of Properties of Construction Materials by Charged-Particle Beams, Sverdlovsk, May 21–24 (1991) [in Russian], Sverdlovsk (1991), Vol. 1; Vol. 2; Vol. 3; Vol. 4.

  31. A. J. Perry, Surface Engineering,3/2, 154–160 (1987).

    Google Scholar 

  32. P. Madakson, J. Materials Science and Engineering,90, 205–212 (1987).

    Google Scholar 

  33. S. G. B. Fishman, M. Ahmed, and D. I. Potter, J. Materials Science and Engineering,90, 135–142 (1987).

    Google Scholar 

  34. G. K. Wolf, Physical Chemistry Institute, University of Heidelberg at Neuenheimer Feld 500, 6900 [in German], Heidelberg, West Germany (1988).

  35. J. D. McGervey and G. Welsch, Case Western Reserve University, Cleveland, Ohio 44106 USA (1988), pp. 427–429.

  36. R. Pratap and M. H. N. Beshai, J. Thin Solid Films,146, 33–36 (1987).

    Google Scholar 

  37. G. K. Wolf, The Minerals, Metals of Materials Society, Chicago, Sept. 26–29 (1989), pp. 147–166.

  38. V. Heera and B. Rauschenbach, Central Institute for Nuclear Research, Rossendorf PF 19, East Germany 8051; Dresden, East Germany, pp. 207–209.

  39. X. Zhou, H. K. Dong, H. D. Li, and B. X. Liu, J. Vacuum,39, Nos. 2–4, 307–309 (1989).

    Google Scholar 

  40. K. Sh. Chokin and E. Yu. Pereverzev, Poverkhnost', No. 1, 115–121 (1992).

  41. P. V. Pavlov, Yu. A. Semin, V. D. Skunov, and D. I. Tetel'baum, Fiz. i Khim. Obrab. Mater., No. 6, 53–57 (1991).

  42. N. E. Galat, V. A. Zuev, B. N. Romanyuk, and L. P. Khlistun, Fiz. i Khim. Obrab. Mater., No. 6, 154–155 (1991).

  43. É. M. Diasamidze and A. N. Kalinin, Fiz. i Khim. Obrab. Mater., No. 3, 16–19 (1992).

  44. A. A. Nikitin, N. G. Travina, M. I. Guseva, and I. A. Ryzhkov, Poverkhnost', No. 3, 132–137 (1989).

  45. A. M. Smyslov, V. P. Lesunov, and G. P. Grebenyuk, Aviatsionnaya Promyshlennost', No. 12, 50–51 (1992).

  46. M. I. Guseva, A. M. Smyslov, and B. G. Vladimirov, in: Abstracts, Problems in Technological Control of Surface Properties [in Russian], UAI, Ufa (1987), pp. 19–21.

    Google Scholar 

  47. A. M. Smyslov, S. S. Kalabukhov, and V. S. Mukhin, in: Abstracts, All-Union Scientific and Technical Conference, BPI, Bryansk (1990), pp. 71–72.

  48. Yu. D. Yagodkin, A. A. Dal'skii, and O. A. Shadrin, Metalloved. i Term. Obrab. Met., No. 4, 15–20 (1992).

  49. Z. A. Iskanderova, T. D. Radzhabov, and G. R. Rakhimova, Poverkhnost', No. 8, 5–20 (1992).

  50. A. N. Didenko, É. V. Kozlov, Yu. P. Sharkeev, A. I. Ryabchikov, and A. E. Ligachev, Poverkhnost', No. 3, 120–131 (1989).

  51. V. G. Abdrashitov, A. É. Bekhaert, S. A. Gashenko, A. N. Didenko, É. V. Kozlov et al., Poverkhnost', No. 5, 141–152 (1993).

  52. I. G. Romanov and A. L. Chekanov, Poverkhnost', No. 5, 110–114 (1993).

  53. A. V. Belyi, V. F. Malyshev, and S. K. Shikh, Trenie i Iznos,10, No. 2, 338–340 (1989).

    Google Scholar 

  54. V. O. Val'dner, V. P. Kvyadaras, G. A. Ermakov et al., Fiz. i Khim. Obrab. Mater., No. 2, 18–24 (1987).

  55. N. I. Velichko, V. F. Udovenko, A. M. Markus, G. N. Presnyakova, and G. D. Gamulya, Trenie i Iznos,10, No. 1, 164–166 (1989).

    Google Scholar 

  56. B. V. Ushakov, N. V. Alov, S. A. Kozikov, and G. B. Petrov, Fiz. i Khim. Obrab. Mater., No. 5, 38–40 (1989).

  57. Yu. Glushek, E. Endrkovyak, Yu. Kubitskii, Ya. Margan et al., Poverkhnost', No. 1, 269–271 (1989).

  58. E. V. Vasil'eva, S. M. Savicheva, G. P. Smirnov, A. G. Sapozhenkov, and A. V. Fedorov, Fiz. i Khim. Obrab. Mater., No. 1, 80–82 (1989).

  59. N. D. Tomashov, O. A. Zhil'tsova, R. Kh. Zalavutdinov, A. E. Gorodetskii, and M. I. Guseva, Zashchita Metallov,27, No. 6, 1014–1017 (1991).

    Google Scholar 

  60. V. G. Abdrashitov and V. V. Ryzhov, Poverkhnost', No. 7, 148–149 (1989).

  61. V. S. Khmelevskaya, R. B. Grabova, V. G. Malynkin, and S. P. Solov'ev, Poverkhnost', No. 8, 126–132 (1990).

  62. A. G. Ioltukhovskii, M. V. Leont'eva, A. G. Zhukov, V. S. Khmelevskaya et al., Fiz. i Khim. Obrab. Mater., No. 2, 31–35 (1991).

  63. G. Dearnaley, J. Surface Engineering,7, No. 2, 127–136 (1991).

    Google Scholar 

  64. N. G. Travina, I. V. Artamonova, E. V. Potikalova, A. P. Krotov et al., Fiz. i Khim. Obrab. Mater., No. 4, 29–34 (1991).

  65. X. Y. Li, F. J. Wang, Y. K. Wang, and T. C. Ma, J. Materials Science and Engineering,147, No. 1, 77–80 (1991).

    Google Scholar 

  66. Z. A. Iskanderova, T. D. Radzhabov, and G. R. Rakhimova, Poverkhnost', No. 7, 108–114 (1988).

  67. Y. Suezawa, Y. Gondo, M. Doi, and S. Z. Sun, Nuclear Instruments and Methods in Physics Research,B37–B38, 735–738 (1989).

    Google Scholar 

  68. L. Guzman, L. Ciaghi, F. Giacomozzi, and E. Voltolini, J. Materials Science and Engineering,A116, 183–191 (1989).

    Google Scholar 

  69. V. A. Shulov, A. É. Strygin, N. A. Nochovnaya, and L. V. Prokhodtseva, Problemy Prochnosti, No. 11, 40–46 (1990).

  70. A. M. Sulima, A. É. Strygin, and V. A. Shulov, Aviatsionnaya Promyshlennost', No. 2, 4–6 (1988).

  71. V. A. Shulov, A. É. Strygin, A. M. Sulima, and M. I. Guseva, Zashchita Metallov,26, No. 6, 948–953 (1990).

    Google Scholar 

  72. M. I. Guseva, A. É. Strygin, V. A. Shulov, and Yu. D. Yagodkin, Poverkhnost', No. 6, 142–146 (1988).

  73. M. V. Zverev, V. A. Shulov, and A. É. Strygin, Thermodynamics of the Surface Layer of Parts of Gas-Turbine Engines [in Russian], MAI, Moscow (1990).

    Google Scholar 

  74. T. I. Barry, Chemical Thermodynamics in Industry: Models and Computation (Critical Reports on Applied Chemistry, Vol. 8) [Russian translation], Mir, Moscow (1988).

    Google Scholar 

  75. G. B. Sinyarev, N. A. Vatolin, B. G. Trusov, and G. N. Moiseev, Application of Computers for Thermodynamic Calculations of Metallurgical Processes [in Russian], Nauka, Moscow (1982).

    Google Scholar 

  76. A. N. Didenko, A. E. Likhachev, and I. B. Kurakin, Effect of Beams of Charged Particles on the Surface of Metals and Alloys [in Russian], Énergoatomizdat, Moscow (1987).

    Google Scholar 

  77. G. Y. Dearnaley, J. Surface Engineering,4, No. 10, 87–99 (1990).

    Google Scholar 

  78. A. K. Misra, D. P. Whittle, and W. L. Worrel, Materials of Molecular Research Division, September (1980).

  79. M. I. Gol'dshtein, V. S. Litvinov, and B. M. Bronfin, Metal Physics of High-Strength Alloys [in Russian], Metallurgiya, Moscow (1986).

    Google Scholar 

  80. V. A. Shulov, in: The Surface Layer, Precision, and Operating Properties of Machine and Instrument Parts [in Russian], Znanie, Moscow (1989), pp. 16–19.

    Google Scholar 

  81. V. A. Shulov and A. M. Sulima, in: The Surface Layer, Precision, and Operating Properties of Machine and Instrument Parts [in Russian], Znanie, Moscow (1989), pp. 73–78.

    Google Scholar 

  82. M. E. Brown, D. Dollimore, and A. K. Galwey, Solid-State Reactions [Russian translation], Mir, Moscow (1983).

    Google Scholar 

  83. N. P. Morozov and D. I. Tetel'baum, Fiz. Tekh. Poluprovodn.,17, No. 5, 838–842 (1983).

    Google Scholar 

  84. P. V. Pavlov, D. I. Tetelbaum, and V. D. Skunov, J. Physics Stat. Solid. (a),9, No. 1, 395–402 (1986).

    Google Scholar 

  85. V. N. Bykov, V. G. Malynkin, and V. S. Khmelevskaya, Topics in Atomic Science and Technology. Series: Physics of Radiation Damage and Radiation Materials Science [in Russian], Énergoatomizdat, Moscow (1989), No. 3(50), 45–52 (1989).

    Google Scholar 

  86. A. N. Didenko, A. E. Ligachev, É. V. Kozlov, I. B. Kurakin, and Yu. P. Sharkeev, Zh. Tekh. Fiz.,296, No. 4, 869–871 (1987).

    Google Scholar 

  87. A. D. Pogrebnjak and A. M. Tolopa, Nuclear Instruments and Methods in Physics Research, North-Holland (1990).

  88. D. G. Armour, Vacuum,37, No. 5/6, 423–427 (1987).

    Google Scholar 

  89. C. T. McHargue, International Metals Reviews,31, No. 2, 49–73 (1986).

    Google Scholar 

  90. Abstracts, All-Union Conference on Ion-Beam Modification of Materials [in Russian], Chernogolovka, June 23–25 (1987).

  91. V. S. Vasil'ev, A. N. Garashchenko, M. I. Guseva et al., Poverkhnost', No. 11, 133–138 (1987).

  92. A. N. Garashchenko, M. I. Guseva, A. A. Noskov et al., Aviatsionnaya Promyshlennost', No. 9, 55–57 (1987).

  93. V. A. Shulov, N. A. Nochovnaya, A. M. Sulima et al., “Application of ion-beam treatment for enhancement of service characteristics of compressor vanes of a gas-turbine engine made of titanium alloys,” RTM 1.2.127 (1988).

  94. V. A. Shulov, N. A. Nochovnaya, and A. É. Strygin, Zashchita Metallov,27, No. 3, 459–466 (1991).

    Google Scholar 

  95. N. V. Makarets and G. A. Fal'ko, Poverkhnost', No. 1, 116–119 (1985).

  96. N. V. Makarets, G. A. Fal'ko, and A. M. Fedorchenko, Poverkhnost', No. 5, 29–35 (1985).

  97. E. V. Kuril'chik, P. V. Pavlov, A. P. Pavlov, and D. I. Tetel'baum, Poverkhnost', No. 4, 102–107 (1992).

  98. V. P. Zhukov and A. V. Demidov, Atomnaya Énergiya,59, No. 1, 273–276 (1985).

    Google Scholar 

  99. V. P. Zhukov and A. A. Boldin, Atomnaya Énergiya,63, No. 6, 375–379 (1987).

    Google Scholar 

  100. A. A. Boldin, Author's Abstract, Dissertation in competition for the academic degree of Candidate of the Physical and Mathematical Sciences, MIFI, Moscow (1992).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 72–91, May, 1994.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Shulov, V.A. Effect of ion implantation on the chemical composition and structure of surface layers of heat-resistant alloys. Russ Phys J 37, 462–477 (1994). https://doi.org/10.1007/BF00560116

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00560116

Keywords

Navigation