Abstract
New approximate equations for the conductivity of metal films are derived from the theoretical predictions of the surface roughness model previously proposed to describe the effect of the rms surface roughness on the film conductivity. Comparison between exact and approximate values of the film conductivity shows good agreement in well defined thickness and roughness parameters ranges. It is found that these approximate equations are convenient tools for a systematic study of the influence of annealing temperature or condensation conditions on the film surface properties. On the basis of the present model previously published data are reinterpreted giving experimental values for the fractional change in the surface roughness due to the nucleation of a metal overlayer.
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Tellier, C.R. Experimental determination of the surface roughness parameter in metal films. J Mater Sci 20, 4514–4520 (1985). https://doi.org/10.1007/BF00559342
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DOI: https://doi.org/10.1007/BF00559342