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Periodic structures in pyrolytic laser-CVD of W from WCl6

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Abstract

In laser-induced direct writing of W stripes from an admixture of WCl6 and H2 non-coherent periodic structures have been observed. These structures appear only in the presence of small amounts of O2. Together with this structure formation, an oscillating change in the surface absorptivity and morphology has been observed. A special setup that permits to determine the absorptivity of deposits on a micrometer scale has been developed.

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References

  1. For an overview see: D. Bäuerle: Chemical Processing with Lasers, Springer Ser. Mater. Sci., Vol. 1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  2. Y.C. Du, U. Kempfer, K. Piglmayer, D. Bäuerle: Appl. Phys. A 39, 167 (1986)

    Google Scholar 

  3. R.B. Jackman, J.S. Foord, A.E. Adams, M.L. Lloyd: J. Appl. Phys. 59, 2031 (1986)

    Google Scholar 

  4. D. Braichotte, H. van den Bergh: Appl. Phys. A 44, 353 (1987)

    Google Scholar 

  5. S. Preuß, H. Stafast: Appl. Phys. A 54, 152 (1992)

    Google Scholar 

  6. J. Messelhäuser, E.B. Flint, H. Suhr: Appl. Phys. A 55, 196 (1992)

    Google Scholar 

  7. N. Arnold, R. Kullmer, D. Bäuerle: Microelectron. Eng. 20, 31 (1993)

    Google Scholar 

  8. R. Kullmer, P. Kargl, D. Bäuerle: Thin Solid Films 218, 122 (1992)

    Google Scholar 

  9. N. Arnold, D. Bäuerle: Microelectron. Eng. 20, 43 (1993)

    Google Scholar 

  10. E.J. Mehalchick, M.B. MacInnis: Electrochem. Technol. 6, 66 (1968)

    Google Scholar 

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Authors and Affiliations

  1. Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040, Linz, Austria

    P. B. Kargl, R. Kullmer & D. Bäuerle

Authors
  1. P. B. Kargl
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  2. R. Kullmer
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  3. D. Bäuerle
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Kargl, P.B., Kullmer, R. & Bäuerle, D. Periodic structures in pyrolytic laser-CVD of W from WCl6 . Appl. Phys. A 57, 175–179 (1993). https://doi.org/10.1007/BF00331441

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  • DOI: https://doi.org/10.1007/BF00331441

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