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Excimer laser surface treatment of bulk ceramics

  • Surfaces And Multilayers
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Abstract

Changes of surface morphology following excimer laser (KrF, ArF) irradiation were investigated for three technical ceramic materials (TZP, PSZ, Si3N4). Zirconia samples exhibit a smooth and glass-like surface at the low power density regime, while at higher power densities colour changes were observed due to changes in the chemical composition of the bulk material. In the silicon nitride samples new crystals of specific orientation are formed, which could be crystalline silicon.

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Authors and Affiliations

  1. Institute of Electronic Structure and Laser, Laser Applications Laboratory, Foundation for Research and Technology — Hellas, P.O. Box 1527, GR-71110, Iraklion, Crete, Greece

    E. Hontzopoulos

  2. CERECO S.A., P.O. Box 146, GR-34100, Chalkida, Greece

    E. Damigos

Authors
  1. E. Hontzopoulos
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  2. E. Damigos
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Hontzopoulos, E., Damigos, E. Excimer laser surface treatment of bulk ceramics. Appl. Phys. A 52, 421–424 (1991). https://doi.org/10.1007/BF00323653

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  • DOI: https://doi.org/10.1007/BF00323653

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