Deposition of diamond-like carbon

Robertson, J.

doi:10.1007/978-94-011-0725-9_9

J. Robertson

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6 Citations

Abstract

Diamond-like carbon refers to forms of amorphous carbon and hydrogenated amorphous carbon containing a sizeable fraction of sp³ bonding, which makes them mechanically hard, infrared transparent and chemically inert. This paper discusses the various thin film deposition processes used to form diamond-like carbon and the deposition mechanisms responsible for promoting the metastable sp³ bonding.

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J. Robertson
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J. J. Thomson Physical Laboratory, University of Reading, Whiteknights, Reading, RG6 2AF, UK
Alan H. Lettington

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Robertson, J. (1994). Deposition of diamond-like carbon. In: Lettington, A.H., Steeds, J.W. (eds) Thin Film Diamond. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0725-9_9

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DOI: https://doi.org/10.1007/978-94-011-0725-9_9
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4312-0
Online ISBN: 978-94-011-0725-9
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