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Structure and Electronic Properties of Diamond-Like Carbon

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Diamond and Diamond-like Films and Coatings

Part of the book series: NATO ASI Series ((NSSB,volume 266))

Abstract

This paper reviews the structure and electronic properties of the various forms of amorphous carbon (a-C) and hydogenat:ed amorphous carbon (a-C:H). It is shown that a-C:H consists of clusters of 3-coordinated sp2 carbon embedded in a sp3 bonded matrix. The sp2 regions are found to control the electronic properties such as band gap while the sp3 regions control mechanical properties such as rigidity and hardness. A model for the mechanical properties is introduced. The various experimental methods of determining atomic structure are critically reviewed and deposition processes favouring sp3 bonding are discussed. Recent data indicate that a-C deposited from mass-selected ion beams is highly sp3 bonded and has a hardness close to diamond.

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References

  1. S. Aisenberg and R. Chabot, J App Phys 42 2953 (1971)

    Article  ADS  Google Scholar 

  2. J. C. Angus, P. Koidl and S. Domitz, in ‘Plasma Deposited Thin Films’, Ed J. Mort (CRC Press, 1986 )

    Google Scholar 

  3. J.Robertson, Adv Phys 35 317 (1986)

    Article  ADS  Google Scholar 

  4. J.Robertson, Mat Sci Forum 52 125 (1990)

    Article  Google Scholar 

  5. P.Koidl,C.Wild,B.Dischler,J.Wagner and M. Ramsteiner, Mat Sci Forum 52 41 (1990); P. Koidl, this volume; Ch. Wild, this volume

    Article  Google Scholar 

  6. D.F. R. Mildner and J. M. Carpenter, J Non-Cryst Solids 47 391 (1982)

    Article  ADS  Google Scholar 

  7. J.Hauser, J Non-Cryst Solids 23 21 (1977)

    Article  ADS  Google Scholar 

  8. S.D.Berger,D.R.McKenzie and P.J.Martin, Phil Mag Let 57 285 (1988)

    Article  ADS  Google Scholar 

  9. D.C.Green,D. R.McKenzie and P.B.Lukins, Mat Sci Forum 52 103 (1990);

    Article  Google Scholar 

  10. D. R. McKenzie, D. C. Green, P. D. Swift, D. J. H. Cockayne, P. J. Martin, R. P. Netterfield and W. G. Sainty, Thin Solid Films 193 xxx (1990)

    Google Scholar 

  11. P. J. Martin, S. W. Filipczuk, R. P. Netterfield, J. S. Field, D. F. Whitall and D. R. McKenzie, J Mat Sci Lett 7 410 (1988)

    Article  Google Scholar 

  12. P. H. Gaskell, K. W. R. Gilkes and A. Saeed, to be published

    Google Scholar 

  13. J. P. Hirvonen, J. Koshinen, R. Lappalainen and A. Anttila, Mat Sci Forum 52 197 (1990)

    Article  Google Scholar 

  14. J. Ishikawa, Y. Takeiri, K. Ogawa and T. Takagi, J App Phys 61 2509 (1987)

    Article  ADS  Google Scholar 

  15. B. Dischler, ‘Amorphous Hydrogenated Carbon’ ed P Koidl, Proc Euro Mat Res Soc (1987)

    Google Scholar 

  16. K. Enke, Thin Solid Films 80 227 (1981)

    Article  ADS  Google Scholar 

  17. K. Enke, Mat Sci Forum 52 559 (1989)

    Article  Google Scholar 

  18. J. Robertson, E. P. O’Reilly, Phys Rev B 35 2946 (1987)

    Article  ADS  Google Scholar 

  19. J. L. Bredas and G. B. Street, J Phys C 18 L651 (1985)

    Article  ADS  Google Scholar 

  20. F. W. Smith, J App Phys 55 764 (1984)

    Article  ADS  Google Scholar 

  21. D. Beeman, J. Silverman, R. Lynds and M. R. Anderson, Phys Rev B 30 870 (1984)

    Article  ADS  Google Scholar 

  22. G. Galli, R. M. Martin, R. Car, M. Parrinello, Phys Rev Lett 62 555 (1989)

    Article  ADS  Google Scholar 

  23. J. Tersoff, Phys Rev Lett 61 2879 (1988)

    Article  ADS  Google Scholar 

  24. G. S. Painter and D. E. Ellis, Phys Rev B 1 4747 (1970)

    Article  ADS  Google Scholar 

  25. G. S. Painter, D. E. Ellis and A. R. Lubinsky, Phys Rev B 4 3610 (1971)

    Article  ADS  Google Scholar 

  26. D. Wesner, et al, Phys Rev B 28 2152 (1983)

    Article  ADS  Google Scholar 

  27. B. B. Pate, Surface Science 165 83 (1986)

    Article  ADS  Google Scholar 

  28. P. Oelhafen and D. Ugolini, in ref 14.

    Google Scholar 

  29. T. Miyazawa, S. Misawa, S. Yoshida and S. Gonda, J App Phys 55 188 (1984)

    Article  ADS  Google Scholar 

  30. Y. Lifshitz, S. R. Kasi and J. W. Rabalais, Phys Rev Lett 62 1290 (1989)

    Article  ADS  Google Scholar 

  31. B. T. Boiko, L. S. PaLantik and A. S. Deveryanchenki, Sov Phys Dokl 13 237 (1968)

    ADS  Google Scholar 

  32. A. Grill, B. S. Meyerson, V. V. Patel, J. A. Reimer and M. A. Petrich, J App Phys 61 2874 (1987)

    Article  ADS  Google Scholar 

  33. M. A. Petrich, Mat Sci Forum 52 387 (2989)

    Article  Google Scholar 

  34. D. R. McKenzie, L. C. Botten and R. C. McPhedran, Phys Rev Lett 51 280 (1983)

    Article  ADS  Google Scholar 

  35. J. Fink, T. Muller-Heinzerling, J. Pfluger, A. Bubenzer, P. Koidl and G. Grecelius, Solid State Commun 47 887 (1983)

    Article  Google Scholar 

  36. G. Comelli, J. Stohr, C. J. Robinson and W. Jark, Phys Rev B 38 7511 (1988)

    Article  ADS  Google Scholar 

  37. R. H. Jarman, G. J. Ray, R. W. Standley and G. W. Zajac, App Phys Lett 49 1065 (1986)

    Article  ADS  Google Scholar 

  38. J. Fink, T. Muller-Heinzerling, J. Pfluger, B. Scheerer, B. Dischler, P. Koidl, A. Bubenzer and R. E. Sah, Phys Rev B 30 4713 (1984)

    Article  ADS  Google Scholar 

  39. N. Savvides, J App Phys 59 4133 (1986)

    Article  ADS  Google Scholar 

  40. R. A. Roberts and W. C. Walker, Phys Rev 161 730 (1967)

    Article  ADS  Google Scholar 

  41. E. A. Taft and H. R. Phillip, Phys Rev 138 A197 (1965)

    Article  ADS  Google Scholar 

  42. C. Gao, Y. Y. Wang, A. L. Ritter and J. R. Dennison, Phys Rev Lett 62 945 (1989)

    Google Scholar 

  43. R. Sonnenschein, M. Hanfland and K. Syassen, Phys Rev B 38 3152 (1988)

    Article  ADS  Google Scholar 

  44. J. Fink, private communication

    Google Scholar 

  45. S. Kaplan, F. Jansen and J. Machonkin, App Phys Lett 47 750 (1985)

    Article  ADS  Google Scholar 

  46. K. Yamamoto, Y. Ichikawa, T. Nakayama and Y. Tawada, Jpn J App Phys 27 1415 (1988)

    Article  ADS  Google Scholar 

  47. M. A. Tamor and C. H. Wu, J App Phys 67 1007 (1990)

    Article  ADS  Google Scholar 

  48. D. E. Axelson, ‘Solid State Nuclear Magnetic Resonance of Fossil Fuels’ ( Multiscience Publications, Canada, 1985 )

    Google Scholar 

  49. M. A. Tamor, C. H. Wu, R. O. Carter. and N. E. Lindsay, App Phys Lett 55 1388 (1989)

    Article  ADS  Google Scholar 

  50. J. W. Zou, K. Reichelt, K. Schmidt and B. Dischler, J App Phys 65 3914 (1989)

    Article  ADS  Google Scholar 

  51. J. W. Zou, K. Schmidt, K. Reichelt and B. Dischler, J App Phys 67 487 (1990)

    Article  ADS  Google Scholar 

  52. R. E. Shroder, R. J. Nemanich and J. T. Glass, Phys Rev B 41 3738 (1990)

    Article  ADS  Google Scholar 

  53. R. J. Nemanich and S. A. Solin, Phys Rev B 20 392 (1979)

    Article  ADS  Google Scholar 

  54. F. Tuinstra and J. L. Koenig, J Chem Phys 53 1126 (1970)

    Article  ADS  Google Scholar 

  55. N. Wada and S. A. Solin, Physica B 105 353 (1981)

    Article  Google Scholar 

  56. M. Ramsteiner and J. Wagner, App Phys Lett 51 1355 (1987)

    Article  ADS  Google Scholar 

  57. J. Wagner, M. Ramsteiner, C. Wild and P. Koidl, Phys Rev B 40 1817 (1989)

    Article  ADS  Google Scholar 

  58. M. A. Tamor, J. A. Haire, C. H. Wu and K. C. Hass, App Phys Let 54 123 (1989)

    Article  ADS  Google Scholar 

  59. M. Yoshikawa, G. Katagiri, H. Ishitani and T. Akamatsu, App Phys Let 52 1639 (1988); J App Phys 64 6464 (1988)

    ADS  Google Scholar 

  60. R. P. Vidano, D. B. Fischbach, L. J. Willis and T. M. Loehr, Solid State Commun 39 341 (1981)

    Article  ADS  Google Scholar 

  61. S. M. Rossnagel, M. A. Russak and J. J. Cuomo, J Vac Sci Technol A 5 2150 (1987)

    Article  ADS  Google Scholar 

  62. C. Weissmantel, Thin Solid Films 92 55 (1982)

    Article  ADS  Google Scholar 

  63. X. Jiang, J. W. Zou, K. Reichelt and P. Grunberg, J App Phys 66 4729 (1989)

    Article  ADS  Google Scholar 

  64. J. C. Phillips, J Non-Cryst Solids 34 153 (1979)

    Article  ADS  Google Scholar 

  65. M. F. Thorpe, J Non-Cryst Solids 57 355 (1983)

    Article  ADS  Google Scholar 

  66. H. He and M. F. Thorpe, Phys Rev Lett 54 2107 (1985)

    Article  ADS  Google Scholar 

  67. J. C. Angus and F. Jansen, J Vac Sci Technol A 6 1778 (1988)

    Article  ADS  Google Scholar 

  68. R. J. Nemanich, G. Lucovsky and S. A. Solin, Solid State Commun 23 117 (1977)

    Article  ADS  Google Scholar 

  69. C. A. Brookes, Phil Mag A 43 529 (1981)

    Article  ADS  Google Scholar 

  70. X. Jiang, K. Reichelt and B. Stritzker, J App Phys 66 5805 (1989)

    Article  ADS  Google Scholar 

  71. A. Kelly and N. H. MacMillan, ‘Strong Solids’ (Oxford University Press, 1986 )

    Google Scholar 

  72. H. M. Hawthorne, Carbon 13 215 (1975).

    Article  Google Scholar 

  73. J. X. Zhao, R. C. Bradt and P. L. Walker, Carbon 23 15 (1985)

    Article  Google Scholar 

  74. V. I. Trefilov and Y. V. Milman, Sov Phys Dokl 8 1240 (1964)

    ADS  Google Scholar 

  75. J. W. Zou, K. Schmidt, K. Reichelt and B. Dischler, J App Phys 67 487 (1990)

    Article  ADS  Google Scholar 

  76. X. Jiang, K. Reichelt and B. Stritzker, J App Phys 68 1018 (1990)

    Article  ADS  Google Scholar 

  77. D. Tabor, Rev Phys Technol 1 145 (1970)

    Article  ADS  Google Scholar 

  78. S. S. Chiang, D. B. Marshall and A. G. Evans, J App Phys 53 298 (1982)

    Article  ADS  Google Scholar 

  79. P. J. R. Honeybone, R. J. Newport, W. S. Howells and J. Franks, this volume

    Google Scholar 

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© 1991 Plenum Press, New York

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Robertson, J. (1991). Structure and Electronic Properties of Diamond-Like Carbon. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_21

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  • DOI: https://doi.org/10.1007/978-1-4684-5967-8_21

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5969-2

  • Online ISBN: 978-1-4684-5967-8

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