Abstract
As mentioned in the preceding articles (Lorimer and Cliff, Chapter 7.3; Suter et al., Chapter 7.4 of this volume), X-ray microanalysis of thin foils has the advantage of a better spatial analytical resolution and an improvement in absolute sensitivity compared to the microanalysis of bulk specimens. This is combined both in the STEM and TEM with the high optical resolving power of these instruments. But because of the low count rates in thin-film microanalysis, in some cases we come to the limits of this method. In order to take full advantage of the instrumental possibilities it is therefore necessary to optimize the instrument and its settings. The purpose of this paper is to supply the necessary physical background for this and for the quantitative evaluation of the measurements. In our derivations we use the K α -line as an example. By changing the shell-dependent terms we can apply the equations also for other lines.
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König, R. (1976). Quantitative X-ray Microanalysis of Thin Foils. In: Wenk, HR. (eds) Electron Microscopy in Mineralogy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-66196-9_40
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DOI: https://doi.org/10.1007/978-3-642-66196-9_40
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