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X-Ray Techniques

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Analytical Methods and Instruments for Micro- and Nanomaterials

Part of the book series: Lecture Notes in Nanoscale Science and Technology ((LNNST,volume 23))

Abstract

X-ray techniques are non-destructive material analysis methods to provide information about lattice constant, strain, material composition, layer thickness, defect density, interface quality, grain size, texture, etc. This chapter begins with the basic definitions in crystallography and crystal defects, x-ray diffraction, and then the discussion extend to the x-ray applications for material analysis ranging from powder diffraction, and grazing-angle reflectivity measurements to high-resolution measurements. The content gives also examples for how to apply x-ray diffraction to study the nano-scale materials and devices.

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Authors and Affiliations

  1. Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou, 510535, China

    Henry H. Radamson

  2. Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China

    Henry H. Radamson

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  1. Henry H. Radamson
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Correspondence to Henry H. Radamson .

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Radamson, H.H. (2023). X-Ray Techniques. In: Analytical Methods and Instruments for Micro- and Nanomaterials. Lecture Notes in Nanoscale Science and Technology, vol 23. Springer, Cham. https://doi.org/10.1007/978-3-031-26434-4_1

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