Abstract
This paper documents the evaluation of three parts-cleaning processes for disk-drive parts: Freon TF/ultrasonics, water/ultrasonics, and water spray systems. Particulate, organic, and ionic contaminants, along with moisture residue, were measured and compared. The data showed that a water cleaning system was a feasible replacement for a Freon cleaning system for disk-drive parts.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Stratospheric ozone is decreasing, Science, 239, 1489 (March 25, 1988).
(a) The changing atmosphere: implications for mankind, a C&EN special issue, Chemical & Engineering News, (November 24, 1986); (b) GFC production: DuPont seeks total phaseout, Chemical & Engineering News, 4–5 (April 4, 1988).
Freon is a registered trademark of the DuPont Company. The chemical name for Freon TF is 1,1,2-trichlorotrifluoroethane (commonly known as CFC113); it belongs to the chemical family of chlorofluorocarbons (CFCs).
I. F. Stowers, Advances in cleaning metal and glass surfaces to micron-level cleanliness, J. Vac. Sci. Technol., 15, 751 (1978).
Q.T. Phillips, G. J. Stone and J.M. Baldwin, Parts Cleaning: An evaluation of ultrasonic systems, Proceedings of 30th Annual Technical Meeting of the Institute of Environmental Sciences, p. 1, 1984.
V. B. Menon, L. D. Michaels, R. P. Donovan, V. L. Debler and M. B. Ranade, Particle removal from semiconductor wafers using cleaning solvents, in “Particles in Gases and Liquids 1: Detection, Characterization and Control”, K. L. Mittal, editor, pp. 259–271, Plenum Press, New York, 1989.
W. G. Kenyon and J. J. Daly, A comparison of solvent and aqueous processes for cleaning printed wiring assemblies, Proceedings of the Technical Program of International Electronic Packaging and Production Conference, p. 50, 1980.
Triton is a registered trademark of Rohm and Haas Company.
Tergitol 1X is a surfactant supplied by Union Carbide Corporation.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1989 Plenum Press, New York
About this chapter
Cite this chapter
Ko, M. (1989). Comparison of Freon with Water Cleaning Processes for Disk-drive Parts. In: Mittal, K.L. (eds) Particles on Surfaces 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0531-6_23
Download citation
DOI: https://doi.org/10.1007/978-1-4613-0531-6_23
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4612-7852-8
Online ISBN: 978-1-4613-0531-6
eBook Packages: Springer Book Archive