Abstract
Magnetron sputtering systems for the deposition of dielectric layers with a gradient variation in the refractive index are studied. A technology for the deposition of gradient coatings using a two-magnetron system operating in a mid-frequency pulsed ion sputtering mode is proposed. At a constant composition of the reaction gas medium and in an invariable magnetron operation mode, the required distribution profile of the refractive index is achieved owing to the substrate motion between magnetrons with targets made of different materials. The process is laser- and plasma-assisted and in situ optically controlled.
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Original Russian Text © O.D. Volpian, A.I. Kuzmichev, Yu.A. Obod, 2014, published in Fizika i Khimiya Obrabotki Materialov, 2014, No. 3, pp. 25–32.
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Volpian, O.D., Kuzmichev, A.I. & Obod, Y.A. Magnetron technology of production of gradient optical coatings. Inorg. Mater. Appl. Res. 6, 234–239 (2015). https://doi.org/10.1134/S2075113315030132
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DOI: https://doi.org/10.1134/S2075113315030132