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Optimization of Optical Modulation in Amorphous WO3 Thin Films

  • Original Article - Electronics, Magnetics and Photonics
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Abstract

WO3 thin films were prepared on indium-tin oxide (ITO) glass substrates at different substrate temperature by radio frequency magnetron sputtering. Then the films were soaked in five organic solvents of acetone, ethanol, cyclohexane, acetonitrile and ethyl acetate for 48 h, respectively. The changes in the microstructure, surface morphology and electrochromic (EC) properties of WO3 thin films before and after the immersion treatment were systematically studied. It was found that after soaking in ethanol, the optical modulation of amorphous WO3 thin films deposited at room temperature increased from 50 to 85%, showing excellent EC performance. Moreover, the immersion treatment in ethanol is also helpful for improving the EC properties of amorphous WO3 thin films prepared at elevated substrate temperature. However, after immersion in the other organic solvents, the optical modulation of WO3 thin films increased less (for acetone: 77%) or even decreased significantly (for cyclohexane, acetonitrile and ethyl acetate: 31%, 30% and 35%, respectively). In addition, the immersion treatment in ethanol cannot improve the optical modulation of crystalline WO3 thin films prepared at 600 °C, which dropped from 58 to 40%. The authors believe that this is mainly related to the different dredging effects of various organic solvents on the transport channels of Li-ions and electrons in WO3 thin films. Therefore, this work provides a new approach for the optimization of EC performance of amorphous WO3 thin films.

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Acknowledgements

This work was financially supported by Natural Science Foundation of Jiangsu Province (BK20191453) and Research and Innovation Program for Graduate Students of Jiangsu Province (KYCX21_2819 and KYCX21_2825).

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Authors and Affiliations

  1. Experiment Center of Electronic Science and Technology, School of Microelectronics and Control Engineering, Changzhou University, Changzhou, 213159, People’s Republic of China

    Jiangbin Su, Xiumei Zhu, Longlong Chen, Yu Liu, Hao Qi, Zuming He & Bin Tang

  2. Key Laboratory of MEMS of the Ministry of Education, SEU-FEI Nano-Pico Center, Southeast University, Nanjing, 210096, People’s Republic of China

    Jiangbin Su

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  1. Jiangbin Su
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  2. Xiumei Zhu
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Correspondence to Jiangbin Su.

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Su, J., Zhu, X., Chen, L. et al. Optimization of Optical Modulation in Amorphous WO3 Thin Films. Electron. Mater. Lett. 20, 131–139 (2024). https://doi.org/10.1007/s13391-023-00447-y

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