Abstract
High entropy oxides (HEOs) have captivated significant concentration due to their unique properties. Manipulation of configurational entropy is the main key for extraordinary behaviours, leading to unprecedented material design and innovations. Substantial research has been conducted on HEO bulk systems, but films are still in the cradle stage. Inspired by the ground-breaking results of HEOs, a novel form of films named high entropy oxides films (HEOFs) are being fabricated. The focus in this review is on the fabrication process, structure and properties of HEOFs with attention to their strengths and liabilities. Iconic investigations from recent articles are highlighted. The first overview is provided on how HEOFs are fabricated and interesting phenomena such as the impact of processing parameters, the role of dopants on the film are discussed. This review also highlights the structural–microstructural appearance and physical properties, concluding with future possibilities and applications.
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References
Ye Y F, Wang Q, Lu J, Liu C T and Yang Y 2016 Mater. Today 19 349
Yeh J W, Chen S K, Lin S J, Gan J Y, Chin T S, Shun T T et al 2004 Adv. Eng. Mater. 6 299
Tsai M H and Yeh J W 2014 Mater. Res. Lett. 2 107
Rost C M, Sachet E, Borman T, Moballegh A, Dickey E C, Hou D et al 2015 Nat. Commun. 6 8485
Sarkar A, Wang Q, Schiele A, Chellali M R, Bhattacharya S S, Wang D et al 2019 Adv. Mater. 31 1806236
Musicó B L, Gilbert D, Ward T Z, Page K, George E, Yan J et al 2020 APL Mater. 8 040912
Salian A and Mandal S 2021 Crit. Rev. Solid State Mater. Sci. 1
Zhang Y, Zuo T T, Tang Z, Gao M C, Dahmen K A, Liaw P K et al 2014 Prog. Mater. Sci. 61 1
Murty B S, Yeh J W, Ranganathan S and Bhattacharjee P P 2019 (eds) High-entropy alloys (Netherlands: Elsevier)
Lei Z, Liu X, Wang H, Wu Y, Jiang S and Lu Z 2019 Scr. Mater. 165 164
Lin M I, Tsai M H, Shen W J and Yeh J W 2010 Thin Solid Films 518 2732
Tsau C H, Yang Y C, Lee C C, Wu L Y and Huang H J 2012 Proc. Eng. 36 246
Tsau C H, Hwang Z Y and Chen S K 2015 Adv. Mater. Sci. Eng. 2015 353140
Rost C M 2016 PhD thesis (Raleigh, North Carolina: North Carolina State University)
Meisenheimer P B, Kratofil T J and Heron J T 2017 Sci. Rep. 7 13344
Sharma Y, Musico B L, Gao X, Hua C, May A, Herklotz A et al 2018 Phys. Rev. Mater. 2 060404
Kotsonis G N, Rost C M, Harris D T and Maria J P 2018 MRS Commun. 8 1371
Kotsonis G N, Meisenheimer P B, Miao L, Roth J, Wang B, Shafer P et al 2020 Phys. Rev. Mater. 4 100401
Sharma Y, Zheng Q, Mazza A R, Skoropata E, Heitmann T, Gai Z et al 2020 Phys. Rev. Mater. 4 014404
Mazza A R, Skoropata E, Sharma Y, Lapano J, Heitmann T W, Musico B L et al 2021 arXiv:2104.05552
Witte R, Sarkar A, Kruk R, Eggert B, Brand R A, Wende H et al 2019 Phys. Rev. Mater. 3 034406
Zhou L, Li F, Liu J X, Hu Q, Bao W, Wu Y et al 2020 J. Eur. Ceram. Soc. 40 5731
Kirnbauer A, Spadt C, Koller C M, Kolozsvári S and Mayrhofer P H 2019 Vacuum 168 108850
Yang Z M, Zhang K, Qiu N, Zhang H B, Wang Y and Chen J 2019 Chin. Phys. B 28 046201
Bi L, Li X, Li Z, Hu Y, Zhang J, Wang Q et al 2020 Surf. Coat. Technol. 402 126326
Ahn M, Park Y, Lee S H, Chae S, Lee J, Heron J T et al 2021 Adv. Electron. Mater. 7 2001258
Wang T H, Kuo C T, Chung P H, Liu C I, Lu Y Y, Lee Y T et al 2021 J. Mater. Chem. C 9 4961
Patel R K, Ojha S K, Kumar S, Saha A, Mandal P, Freeland J W et al 2020 Appl. Phys. Lett. 116 071601
Jacobson V, Diercks D, To B, Zakutayev A and Brennecka G 2021 J. Eur. Ceram. Soc. 41 2617
Chopra K L, Paulson P D and Dutta V 2004 Prog. Photovolt. Res. Appl. 12 69
Eckertová L 1977 (ed) Physics of thin films (New York: Plenum Press)
Nikitenkov N 2017 (ed) Modern technologies for creating the thin-film systems and coatings (Rijeka Croatia: Intechopen)
Frey H 2015 (ed) Handbook of thin-film technology (Berlin Heidelberg: Springer) p 3
Ohring M 1994 Proc. SPIE 2114 Laser-induced damage in optical materials 1993 p 624
Brahlek M, Mazza A R, Pitike K C, Skoropata E, Lapano J, Eres G et al 2020 Phys. Rev. Mater. 4 054407
Rák Z, Maria J P and Brenner D W 2018 Mater. Lett. 217 300
Ndione P F, Shi Y, Stevanovic V, Lany S, Zakutayev A, Parilla P A et al 2014 Adv. Funct. Mater. 24 610
Zhang W, Mazza A R, Skoropata E, Mukherjee D, Musico B, Zhang J et al 2020 ACS Nano 14 13030
Zhang J C, Sun S, Yang Z M, Qiu N and Wang Y 2020 Chin. Phys. B 29 66104
Nguyen T X, Su Y H, Hattrick Simpers J, Joress H, Nagata T, Chang K S et al 2020 ACS Comb. Sci. 22 858
Miao L, Kotsonis G, Maria J P and Alem N 2020 Microsc. Microanal. 26 1196
Lowndes D H, Geohegan D B, Puretzky A A, Norton D P and Rouleau C M 1996 Science 273 898
Mattox D M 2010 (ed) Handbook of physical vapor deposition (PVD) processing (USA: William Andrew)
Tudose I V, Comanescu F, Pascariu P, Bucur S, Rusen L, Iacomi F et al 2019 (eds) Functional nanostructured interfaces for environmental and biomedical applications (Elsevier) p26
Eason R 2006 (ed) Pulsed laser deposition of thin films: applications-led growth of functional materials (New Jersey: John Wiley & Sons)
Özgür Ü, Alivov Y I, Liu C, Teke A, Reshchikov M A, Doǧan S et al 2005 J. Appl. Phys. 98 1
Almeida J B 1989 (ed) Materials modification by high-fluence ion beams (The Netherlands: Springer) p92
Kelly P J and Arnell R D 2000 Vacuum 56 159
Safi I 2000 Surf. Coat. Technol. 127 203
Waits R K 1978 J. Vac. Sci. Technol. 15 179
Lundin D, Minea T and Gudmundsson J T 2019 (ed) High power impulse magnetron sputtering: fundamentals, technologies, challenges and applications (Elsevier) p48
Ellmer K 2000 J. Phys. D: Appl. Phys. 33 R17
Pawlowski L 2008 (ed) The science and engineering of thermal spray coatings (England: John Wiley & Sons)
Fauchais P, Vardelle A and Dussoubs B 2001 J. Therm. Spray Technol. 10 44
Fauchais P 2004 J. Phys. D: Appl. Phys. 37 R86
Lange F F 1996 Science 273 903
Shannon R D 1976 Acta Crystallogr. Sect. A 32 751
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This work was supported by the Science and Engineering Research Board (SERB), Department of Science and Technology (DST) (ECR/2015/000339), Government of India
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Salian, A., Mandal, S. Review on the deposition, structure and properties of high entropy oxide films: current and future perspectives. Bull Mater Sci 45, 49 (2022). https://doi.org/10.1007/s12034-021-02617-w
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DOI: https://doi.org/10.1007/s12034-021-02617-w