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Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution

  • Topical Collection: 19th Conference on Defects (DRIP XIX)
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Abstract

Non-doped ZnMgO thin film deposited at room temperature on a white glass using a diethylzinc-based solution grown by atmospheric conventional spin coating was annealed at 150°C. The sample had an average optical transmittance of more than 85% in the visible region, and a-axis orientation hexagonal polycrystal, a dense crystal, and a flat surface. Moreover, the n-type sample was obtained from the predominant zinc interstitial caused by x-ray photoemission spectroscopy. A sample had a resistivity of 14 × 106 Ω cm, carrier concentration of 3.9 × 1011 cm−3, and mobility of 5.0 cm2 (Vs)−1.

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Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, University of Miyazaki, Miyazaki, 889-2192, Japan

    Kenji Yoshino, Himeka Tominaga, Yuta Komaki & Masato Imai

  2. Institute for Tenure Track Promotion, University of Miyazaki, Miyazaki, 889-2192, Japan

    Tomohiro Higashi

  3. Department of Electrical and Electronic Engineering, Ritsumeikan University, Shiga, 525-8577, Japan

    Takashi Minemoto

  4. Department of Engineering Science, The University of Electro-Communications, Chofu, Tokyo, 182-8585, Japan

    Qing Shen

  5. i-Powered Energy System Research Center, The University of Electro-Communications, Chofu, Tokyo, 182-8585, Japan

    Shuzi Hayase

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  1. Kenji Yoshino
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  2. Himeka Tominaga
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  7. Qing Shen
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Correspondence to Kenji Yoshino or Tomohiro Higashi.

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Yoshino, K., Tominaga, H., Komaki, Y. et al. Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution. J. Electron. Mater. 52, 5134–5139 (2023). https://doi.org/10.1007/s11664-023-10475-x

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  • DOI: https://doi.org/10.1007/s11664-023-10475-x

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