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Microfabrication by two-photon lithography, and characterization, of SiO2/TiO2 based hybrid and ceramic microstructures

  • Review Paper: Nano-structured materials (particles, fibers, colloids, composites, etc.)
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Abstract

High resolution fabrication using two-photon lithography is extensively studied for a large range of materials, from polymer to inorganics. Hybrid materials including a sol–gel step have been developed since two decades to increase mechanical or optical properties in particular on silicon-based materials. Among the metal oxide, few studies have been dedicated to titanium and, because of the high reactivity of titanium precursors, obtaining a resin with a high part of titanium is challenging. Indeed, resins for two-photon lithography have to be stable for the processing time and titanium precursors are more difficult to operate due to their higher reactivity and often require extreme working conditions in order to control the chemical processes. Here, we propose a method, working at ambient conditions, to print submicronic structures of organic–inorganic hybrids with a large proportion of titanium and ceramics using high resolution two-photon process. The material obtained and its evolution during the pyrolysis at 600 and 1000 °C are characterized. We show that TiO2/SiO2-based microceramics can be obtained after the pyrolysis of the microstructures. The respective roles of the two chemical reactions involved in this lithography process, sol–gel condensation and radical photopolymerization, are highlighted.

Highlights

  • 3D printing using two-photon absorption processes for the fabrication of high resolution at the submicronic scale of ceramic components.

  • Printing TiO2-based ceramics of various compositions, controlling the resolution, structures, and shape after annealing is an important challenge and open perspective to large range of applications.

  • Two chemical reactions concomitantly involved during the process are critical, sol–gel condensation and radical photopolymerization.

  • Sol–gel approaches toward high resolution 3D printed ceramics is an extremely promising method.

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Acknowledgements

The authors are grateful to the European Union’s Horizon 2020 research and innovation program PHENOmenon under grant agreement no. 780278 for funding and to the Raman facility in Lyon (France) supported by the Institut National des Sciences de l’Univers (INSU) and the “Programme National de Planétologie”. This is a contribution of the LABEX Lyon Institute of Origins (ANR-10-LABX-0066), within the program “Investissements d’Avenir” (ANR-11-IDEX-0007) at Université de Lyon. The region Auvergne-Rhône-Alpes is acknowledged for the partial funding through the IRICE project 3DFAB.

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Authors and Affiliations

  1. Laboratoire de Chimie, CNRS UMR 5182, Ecole Normale Supérieure de Lyon, Université de Lyon 1, 46 allée d’Italie, 69364, Lyon, France

    Anne Desponds, Akos Banyasz, Chantal Andraud, Patrice Baldeck & Stephane Parola

  2. Laboratoire de Géologie, CNRS UMR 5276, Ecole Normale Supérieure de Lyon, Université de Lyon 1, 46 allée d’Italie, 69364, Lyon, France

    Gilles Montagnac

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  1. Anne Desponds
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Desponds, A., Banyasz, A., Montagnac, G. et al. Microfabrication by two-photon lithography, and characterization, of SiO2/TiO2 based hybrid and ceramic microstructures. J Sol-Gel Sci Technol 95, 733–745 (2020). https://doi.org/10.1007/s10971-020-05355-3

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