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The role of gold clusters in semiconductor microstructure fabrication

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Abstract

Semiconductor wire-like microstructures with nanometer-scale dimensions have been grown by a selforganized technique. This fabrication is based on organometallic vapour-phase epitaxy (OMVPE). Gold is a key material for growing such nanometer-cylinders (called whiskers). Artificially controlling the gold deposition and the subsequent self-organized growth process resulted in successful control of diameter, length, and growth position of whiskers. Low-damage quantum-wire structures were fabricated which showed quantum confinement effects for electrons in quasi one-dimensional-structures. As an application of these structures, GaAs whiskers with p-n junctions were grown and used in quantum-wire light emitters.

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Authors and Affiliations

  1. Central Research Laboratory, Hitachi Ltd, Kokubunji, 185-8601, Tokyo, Japan

    Masataka Shirai, Keichi Haraguchi, Kenji Hiruma & Toshio Katsuyama

Authors
  1. Masataka Shirai
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  2. Keichi Haraguchi
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  3. Kenji Hiruma
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  4. Toshio Katsuyama
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Additional information

About The Authors Masataka Shirai received his MS degree from the University of Tokyo in 1993. Since then he has been working at the Central Research Laboratory of Hitachi Ltd. His current activity is in the development of optoelectronic devices for fibre optic communications.

Kei-ichi Haraguchi received his BS degree in electronics from Waseda University, Tokyo in 1991. He has been working at Hitachi on silicon VLSI devices.

Kenji Haruma received his PhD degree in Applied Physics from the University of Tokyo in 1982. He has been at Hitachi since April 1999 working on crystal growth technology for GaAs and its related compound semiconductors.

Toshio Katsuyama obtained his PhD in Applied Physics from Tohoku University, Sendai, Japan in 1983. Since 1974 he has been working for Hitachi, engaged in research on optical fibres, semiconductor integrated optics and quantum functional devices.

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Shirai, M., Haraguchi, K., Hiruma, K. et al. The role of gold clusters in semiconductor microstructure fabrication. Gold Bull 32, 80–84 (1999). https://doi.org/10.1007/BF03216614

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  • DOI: https://doi.org/10.1007/BF03216614

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