Skip to main content
SpringerLink
Log in

Improvement in Surface Quality of Microchannel Structures Fabricated by Revolving Tip-Based Machining

  • Original Articles
  • Published:
Nanomanufacturing and Metrology Aims and scope Submit manuscript

Abstract

In the present paper, the process parameters of revolving tip-based machining were optimized for the fabrication of microchannel structures. It was found that in comparison with the micromilling process, the main factor affecting the surface quality of revolving tip-based machining originated from residual materials produced in each revolution. Three process parameters, including cutting depth, feeding rate, and tool path strategy, were studied experimentally to optimize the surface quality of the machined aluminum alloy and polymethylmethacrylate (PMMA). It was noticed that at smaller cutting depths (< 3 µm) and feeding rates (< 20 µm/s) with fixed revolving parameters (50 Hz frequency and 6 µm radius), microchannels with better bottom surfaces were formed. Two different types of tool path strategies were designed and compared to obtain the best surface quality (Sa) of aluminum alloy (21 nm) and PMMA (19 nm).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  1. Faustino V, Catarino SO, Lima R, Minas G (2016) Biomedical microfluidic devices by using low-cost fabrication techniques: a review. J Biomech 49(11):2280–2292

    Article  Google Scholar 

  2. Prakash S, Kumar S (2015) Fabrication of microchannels: a review. Proc Inst Mech Eng Part B: J Eng Manuf 229(8):1273–1288

    Article  Google Scholar 

  3. Dornfeld D, Min S, Takeuchi Y (2006) Recent advances in mechanical micromachining. CIRP Ann Manuf Technol 55(2):745–768

    Article  Google Scholar 

  4. Guckenberger DJ, de Groot TE, Wan AM, Beebe DJ, Young EW (2015) Micromilling: a method for ultra-rapid prototyping of plastic microfluidic devices. Lab Chip 15(11):2364–2378

    Article  Google Scholar 

  5. Gozen BA, Ozdoganlar OB (2010) A rotating-tip-based mechanical nano-manufacturing process: nanomilling. Nanoscale Res Lett 5(9):1403

    Article  Google Scholar 

  6. Park S, Mostofa M, Park C, Mehrpouya M, Kim S (2014) Vibration assisted nano mechanical machining using AFM probe. CIRP Ann Manuf Technol 63(1):537–540

    Article  Google Scholar 

  7. Heamawatanachai S, Bamberg E (2009) Design and characterization of a PZT driven micromachining tool based on single-point tool tip geometry. Precision Eng 33(4):387–394

    Article  Google Scholar 

  8. Xue B, Yan Y, Li J, Yu B, Hu Z, Zhao X, Cai Q (2015) Study on the micro-machining process with a micro three-sided pyramidal tip and the circular machining trajectory. J Mater Process Technol 217:122–130

    Article  Google Scholar 

  9. Yan Y, Xue B, Hu Z, Wu D (2016) Machining slight burr formed micro-channels with different moving trajectories of a pyramidal diamond tip. Int J Adv Manuf Technol 84(9–12):2037–2046

    Article  Google Scholar 

  10. Ogilvie I, Sieben V, Floquet C, Zmijan R, Mowlem M, Morgan H (2010) Reduction of surface roughness for optical quality microfluidic devices in PMMA and COC. J Micromech Microeng 20(6):065016

    Article  Google Scholar 

  11. Prentner S, Allen DM, Larcombe L, Marson S, Jenkins K, Saumer M (2010) Effects of channel surface finish on blood flow in microfluidic devices. Microsyst Technol 16(7):1091–1096

    Article  Google Scholar 

  12. Huang Y, Liu S, Yang W, Yu C (2010) Surface roughness analysis and improvement of PMMA-based microfluidic chip chambers by CO2 laser cutting. Appl Surf Sci 256(6):1675–1678

    Article  Google Scholar 

  13. Chen P-C, Pan C-W, Lee W-C, Li K-M (2014) An experimental study of micromilling parameters to manufacture microchannels on a PMMA substrate. Int J Adv Manuf Technol 71(9–12):1623–1630

    Article  Google Scholar 

  14. Yousuff CM, Danish M, Ho ETW, Kamal Basha IH, Hamid NHB (2017) Study on the optimum cutting parameters of an aluminum mold for effective bonding strength of a PDMS microfluidic device. Micromachines 8(8):258

    Article  Google Scholar 

  15. Lin T-Y, Do T, Kwon P, Lillehoj PB (2017) 3D printed metal molds for hot embossing plastic microfluidic devices. Lab Chip 17(2):241–247

    Article  Google Scholar 

  16. Zhao DS, Roy B, McCormick MT, Kuhr WG, Brazill SA (2003) Rapid fabrication of a poly (dimethylsiloxane) microfluidic capillary gel electrophoresis system utilizing high precision machining. Lab Chip 3(2):93–99

    Article  Google Scholar 

  17. Ayatollahi M, Aliha M, Hassani M (2006) Mixed mode brittle fracture in PMMA: an experimental study using SCB specimens. Mater Sci Eng, A 417(1–2):348–356

    Article  Google Scholar 

  18. Xue B, Geng Y, Yan Y, Wang J, Sun Y (2018) Finite element analysis of revolving tip-based cutting process (submitted)

  19. Zeng Q, Qin Y, Chang W, Luo X (2018) Correlating and evaluating the functionality-related properties with surface texture parameters and specific characteristics of machined components. Int J Mech Sci 149:62–72

    Article  Google Scholar 

  20. Xue B, Geng Y, Yan Y, Sun Y (2018) Effect of AFM tip wear on evaluating the surface quality machined by ultraprecision machining process (submitted)

  21. Xue B, Yan Y, Hu Z, Zhao X (2014) Study on effects of scan parameters on the image quality and tip wear in AFM tapping mode. Scanning: J Scanning Microsc 36(2):263–269

    Google Scholar 

  22. Poon CY, Bhushan B (1995) Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler. Wear 190(1):76–88

    Article  Google Scholar 

Download references

Acknowledgements

The authors gratefully acknowledge the financial supports of the Foundation for the National Natural Science Foundation of China (51475108), Innovative Research Groups of the National Natural Science Foundation of China (51521003), Self-Planned Task (SKLRS201606B) of State Key Laboratory of Robotics and System (HIT), and the National Program for Support of Top-notch Young Professors.

Author information

Author notes

  1. Yongda Yan

    Present address: Harbin Institute of Technology, P.O. Box 413, Harbin, 150001, Heilongjiang, People’s Republic of China

Authors and Affiliations

  1. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People’s Republic of China

    Bo Xue, Yanquan Geng & Yongda Yan

  2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People’s Republic of China

    Yanquan Geng, Dong Wang, Yazhou Sun & Yongda Yan

Authors
  1. Bo Xue
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yanquan Geng
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Dong Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Yazhou Sun
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Yongda Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yongda Yan.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Xue, B., Geng, Y., Wang, D. et al. Improvement in Surface Quality of Microchannel Structures Fabricated by Revolving Tip-Based Machining. Nanomanuf Metrol 2, 26–35 (2019). https://doi.org/10.1007/s41871-018-0032-9

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s41871-018-0032-9

Keywords

Search

Navigation