Abstract
In Organic Light Emitting Display (OLED) manufacturing processes, there is a need to enlarge the mother glass substrate to raise its productivity and enable OLED TV. The larger the size of the glass substrate, the more difficult it is to establish a uniform thickness profile of the organic thin-film layer in the vacuum evaporation process. In this paper, a multiple point-source evaporation process is proposed to deposit a uniform organic layer uniformly. Using this method, a uniformity of 3.75% was achieved along a 1,300 mm length of Gen. 5.5 glass substrate (1300 × 1500 mm2).
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Jun, S., Kim, M., Kim, S.H. et al. A study on the evaporation process with multiple point-sources. Electron. Mater. Lett. 9 (Suppl 1), 7–11 (2013). https://doi.org/10.1007/s13391-013-3181-4
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DOI: https://doi.org/10.1007/s13391-013-3181-4