Abstract
Results of heat transfer testing of heat absorption modules (HAM), heat rejection modules (HRM), and a recirculating-liquid cooling system are reported. Low-profile, Cu-based, microchannel heat exchangers (MHEs) were fabricated and used as the HAM as well as components for assembly of a microchannel HRM. Detailed experimental assessment of two different liquid-passing HRMs and a microchannel-based recirculating-liquid cooling system was carried out, and benchmarked against all-solid devices of the same geometric dimensions. Incorporating microchannel liquid flow through each fin, the device-level heat transfer performance of the microchannel HRM was improved by up to ~50%. Detailed testing of a microchannel-based recirculating-liquid cooling system indicate that low-profile Cu MHEs are highly effective in heat flux removal while having a small area/volume footprint, and that enhancing the HRM performance is critical to boosting the overall performance of such recirculating-liquid cooling systems.
Similar content being viewed by others
References
Bin Lu, Chen Ke, Meng WJ, Fanghua Mei (2010) Fabrication, assembly, and heat transfer testing of low-profile copper-based microchannel heat exchangers. J Micromech Microeng 20:115002
Chen Ke, Fanghua Mei, Meng WJ (2010) Transient liquid phase bonding of Cu-based microchannel devices. In: Proceeding of the fifth international conference on micro-manufacturing (ICOMM/4 M 2010) Madison, Wisconsin
Chu RC, Simons RE, Ellsworth MJ, Schmidt RR, Cozzolina V (2004) Review of cooling technologies for computer products. IEEE Trans Dev Mater Reliability 4:568
Fanghua Mei, Parida PR, Jiang J, Meng WJ, Ekkad SV (2008a) Fabrication, assembly, and testing of Cu- and Al-based microchannel heat exchangers. J Microelectromech Sys 17:869
Fanghua Mei, Jiang J, Meng WJ (2008b) Evaluation of bond quality and heat transfer of Cu-based microchannel heat exchange devices. J Vac Sci Technol A26:798
Garimella SV (2006) Advances in mesoscale thermal management technologies for microelectronics. Microelectron J 37(11):1165
Intel® Core™ 2 Duo Processor E8000 and E7000 Series (2009) Document Number 318732-006
Moore GE (1965) Cramming more components onto integrated circuits. Electronics 38(8):114–117
Tuckerman DB, Pease RFW (1981) High performance heat sinking for VLSI. IEEE Electron Dev Lett 2:126
Acknowledgments
The authors gratefully acknowledge partial project support from NSF through grants CMMI-0556100, CMMI-0900167, and IIP-1058523 and Louisiana State Board of Regents through contracts LEQSF(2011-13)-RD-B-03 and LEQSF(2011-13)-RD-B-04. Helpful discussions with Prof. G.B. Sinclair is acknowledged with thanks.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Lu, B., Meng, W.J. & Mei, F. Microelectronic chip cooling: an experimental assessment of a liquid-passing heat sink, a microchannel heat rejection module, and a microchannel-based recirculating-liquid cooling system. Microsyst Technol 18, 341–352 (2012). https://doi.org/10.1007/s00542-011-1397-5
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-011-1397-5