Precision and resolution in laser direct microstructuring with bursts of picosecond pulses

Abstract

Pulsed laser sources facilitate various applications, including efficient material removal in different scientific and industrial applications. Commercially available laser systems in the field typically use a focused laser beam of 10–20 μm in diameter. In line with the ongoing trends of miniaturization, we have developed a picosecond fiber laser-based system combining fast beam deflection and tight focusing for material processing and optical applications. We have predicted and verified the system’s precision, resolution, and minimum achievable feature size for material processing applications. The analysis of the laser’s performance requirements for the specific applications of high-precision laser processing is an important aspect for further development of the technique. We have predicted and experimentally verified that maximal edge roughness of single-micrometer-sized features was below 200 nm, including the laser’s energy and positioning stability, beam deflection, the effect of spot spacing, and efficient isolation of mechanical vibrations. We have demonstrated that a novel fiber laser operating regime in bursts of pulses increases the laser energy stability. The results of our research improve the potential of fiber laser sources for material processing applications and facilitate their use through enabling the operation at lower pulse energies in bursts as opposed to single pulse regimes.