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Elementary processes at solid surfaces immersed in low pressure plasmas

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Plasma Chemistry III

Part of the book series: Topics in Current Chemistry ((TOPCURRCHEM,volume 94))

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  1. IBM Research Laboratory, 95193, San Jose, California

    Harold F. Winters

  2. Physics Department, University of Odense, 5000, Odense, Denmark

    Harold F. Winters

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Stanislav Vepřek Mundiyath Venugopalan

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Winters, H.F. (1980). Elementary processes at solid surfaces immersed in low pressure plasmas. In: Vepřek, S., Venugopalan, M. (eds) Plasma Chemistry III. Topics in Current Chemistry, vol 94. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0048587

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