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Tool Offset Flycutting Multi-layer Hierarchical Microstructures

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Fabrication of Micro/Nano Structures via Precision Machining

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Abstract

The industries of optics, electronics, aerospace, and communication, inspired by nature, have all made extensive use of microstructural functional surfaces. These functions are not only derived from a single layer of microstructures, but they also mainly depend on the joint effects of hierarchical microstructures (HMs). Generally, overlapping two or more layers could generate functional combined and complementary HM. Slow/fast tool servo (S/FTS) technology is commonly used to fabricate micro/nanostructures. However, fabricating HMs with sharp edges is still a challenge when relying on only a commercial 3-axis ultra-precision machine tool (UPMT). In this chapter, the offset-tool-servo end flycutting (OTSEF) system was further developed to fabricate HMs integrating STS and FTS, respectively. Considering the installation and geometry shape of the diamond tool, a tool path based on the OTSEF system was planned. Furthermore, the mathematical modeling of HMs tool path generation was established and different HMs with high quality and precision were successfully machined. The theoretical and experimental results show that the OTSEF system has unique advantages to fabricate HMs. The current study presents a deep insight into tool path modeling and method for HMs using only a 3-axis UPMT.

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Acknowledgements

The work described in this chapter was supported by the National Natural Science Foundation of China (Grant No. 52275454, 51827901), and the Shenzhen Natural Science Foundation (Grant No. 20200826160002001, JCYJ2022053103614032).

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Authors and Affiliations

  1. Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, College of Mechatronics and Control Engineering, Shenzhen University, Nan-hai Ave 3688, Shenzhen, 518060, Guangdong, People’s Republic of China

    Jianpeng Wang & Guoqing Zhang

  2. Jiangmen Vocational and Polytechnic College, Chao-lian Ave 6, Jiangmen, 529091, Guangdong, People’s Republic of China

    Jiankai Jiang

Authors
  1. Jianpeng Wang
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  2. Guoqing Zhang
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  3. Jiankai Jiang
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Corresponding author

Correspondence to Guoqing Zhang .

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Editors and Affiliations

  1. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, Guangdong, China

    Guoqing Zhang

  2. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, Guangdong, China

    Bin Xu

  3. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, Guangdong, China

    Yanjun Lu

  4. Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong

    Suet To

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Wang, J., Zhang, G., Jiang, J. (2023). Tool Offset Flycutting Multi-layer Hierarchical Microstructures. In: Zhang, G., Xu, B., Lu, Y., To, S. (eds) Fabrication of Micro/Nano Structures via Precision Machining. Springer, Singapore. https://doi.org/10.1007/978-981-99-1338-1_3

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  • DOI: https://doi.org/10.1007/978-981-99-1338-1_3

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-99-1337-4

  • Online ISBN: 978-981-99-1338-1

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