Skip to main content
SpringerLink
Log in
Book cover

Fabrication of Micro/Nano Structures via Precision Machining

Modelling, Processing and Evaluation

  • Book
  • © 2023

Overview

Editors:
  1. Guoqing Zhang

    1. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, China

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  2. Bin Xu

    1. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, China

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  3. Yanjun Lu

    1. College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, China

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  4. Suet To

    1. Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  • Provides a variety of feasible machining methods and advanced manufacturing techniques

  • Presents the tool preparation and tool path planning for micro/nano-structure fabrication

  • Identifies essential approaches for ensuring the machining accuracy from micro/nano-structure modeling

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 149.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book USD 199.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (18 chapters)

  1. Front Matter

    Pages i-xii
    Download chapter PDF

  2. Fabrication of Micro/Nano Structures via Precision Mechanical Machining

    1. Front Matter

      Pages 1-1
      Download chapter PDF

    2. Introduction to Precision Machining Micro/Nano Structures

      • Yuting Ma, Guoqing Zhang, Shuaikang Cao
      Pages 3-13

    3. Tool Offset Flycutting Straight-Groove-Type Microstructures

      • Jianpeng Wang, Guoqing Zhang, Jiankai Jiang
      Pages 15-39

    4. Tool Offset Flycutting Multi-layer Hierarchical Microstructures

      • Jianpeng Wang, Guoqing Zhang, Jiankai Jiang
      Pages 41-78

    5. Tool Offset Flycutting Micro-optics Arrays with High-Aspect-Ratio

      • Zhanwen Sun, Suet To, Sujuan Wang
      Pages 79-101

    6. Diamond Milling System for Fabricating Infrared Micro-optics Arrays

      • Zhanwen Sun, Suet To, Sujuan Wang
      Pages 103-128

    7. Cutting Force and Energy Modelling in Ultra-Precision Machining of Micro-structures

      • Zejia Zhao, Yiji Liang
      Pages 129-161

  3. Fabrication of Micro/Nano Structures via Electrical Discharge Machining (EDM)

    1. Front Matter

      Pages 163-163
      Download chapter PDF

    2. Introduction to Electrical Discharge Machining Micro/Nano Structures

      • Weitong Liu, Yuping Li, Bin Xu
      Pages 165-175

    3. Fabrication of 3D Micro-electrode and Its Application in Micro-EDM

      • Yangquan Liu, Weitong Liu, Bin Xu
      Pages 177-193

    4. Fabrication of Micro-structures by Applying Cu-Sn 3D Micro-electrode

      • Zhaozhi Wu, Xiaoyu Wu
      Pages 195-215

    5. Fabrication of Micro-grooves by Applying Laminated Disc Electrodes

      • Weijie Pan, Jianguo Lei, Xiaoyu Wu
      Pages 217-238

    6. Fabrication of Blind Multi-microgrooves by Applying Long-Laminated Electrode

      • Huiyong Wu, Jianguo Lei, Xiaoyu Wu
      Pages 239-260

    7. Geometric Evolution of Microstructures in EDM with Composite Laminated Electrode

      • Kai Jiang, Xiaoyu Wu, Jianguo Lei, Bin Xu
      Pages 261-284

  4. Fabrication of Micro/Nano Structures via Precision Grinding and Injection Molding

    1. Front Matter

      Pages 285-285
      Download chapter PDF

    2. Introduction to Precision Grinding and Injection Molding Micro/Nano Structures

      • Yanjun Lu, Yuming Huang, Jiangxiu Ouyang
      Pages 287-299

    3. Precision Dressing and Truing of Diamond Grinding Wheel with V-tip

      • Yanjun Lu, Jiangxiu Ouyang, Yuming Huang
      Pages 301-318

    4. Precision Grinding of Micro-structures of Hard-Brittle Material Surfaces

      • Yanjun Lu, Yuming Huang, Haojun Huang, Long Zhang
      Pages 319-335

    5. Precision Grinding and Polishing of Optical Micro-structured Surface

      • Chunjin Wang, Xingyu Mou, Wang Luo, Yanjun Lu
      Pages 337-360
Back to top

Keywords

About this book

This book introduces the cutting-edge technology of micro/nano structure fabrication from precision machining, electrical discharge machining (EDM) and precision grinding and injection molding, the contents of the presented book includes​ but not limited to the machining process, cutting tool preparation, tool path generation, and surface evaluation. This book provides a variety of feasible fabrication methods and advanced manufacturing techniques for the precision fabrication of micro/nano-structures, especially for complex micro/nano-structures. Since the book focuses on the micro/nano-structure fabrication methods including hieratical micro/nano-structures, graduate students, engineering technicians, and researchers in related areas will benefit from this book; also, someone in related application fields such as biomedicine, communication, optics may be the potential readers of this book.

Editors and Affiliations

  • College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, China

    Guoqing Zhang, Bin Xu, Yanjun Lu

  • Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong

    Suet To

About the editors

Guoqing Zhang, research professor of Shenzhen University, China. ​ He received his Ph.D degree from The Hong Kong Polytechnic University in 2014. Now, he has been selected as a Shenzhen Peacock Program for Overseas/Professional High-Level Talents. He serves as a Deputy Director of Guangdong Key Laboratory of Electromagnetic Control and Intelligent Robots, Deputy Director of Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, Committee member of Chinese Mechanical Engineering Society Design Branch, Member of Advanced Optical Manufacturing Young Expert Committee of Chinese Optical Engineering Society. His research interest include ultra-precision machining technology and equipment, robots and intelligent equipment etc.. 

 

Bin Xu, associate professor of Shenzhen University, China.​​ He received his Ph.D degree from Shenzhen University in 2013. Now, he serves as a Director of Department of Mechanical and Electronic Engineering. His research interest include micro electrical discharge machining, micro electrochemical machining, laser beam machining etc.. 

 

Yanjun Lu, assistant professor of Shenzhen University, China.​​​ He received his Ph.D degree from South China University of Technology in 2015. Now, he serves as the director of the Joint Training Postgraduate Demonstration Base of Guangdong Province, selected as Science and Technology Commissioner of Guangdong Province, 100 innovative doctoral & post-doctoral fellows in Guangdong Province, Shenzhen High-level talents, and senior members of Chinese Mechanical Engineering Society. His research interests include dressing and truing of coarse diamond grinding wheel, micro-structure grinding, micro injection molding of LED light guide plate and biomedical microfluidic chip etc. 

 

Suet To, full professor of The Hong Kong Polytechnic University, Hong Kong, China. She received her ​PhD in Ultra-precision Machining Technology from The Hong Kong Polytechnic University. Now, ​she serves as the​ associate director of State Key Laboratory of Ultra-precision Machining Technology and Advanced Optics Manufacturing Centre.  She is an active researcher who focuses on ultra-precision machining and material science. Her research interests include ultra-precision machining, advanced optics manufacturing technology, ultra-precision machining of micro/nano-structure and effect on materials. She has published 3 research books, more than 300 international SCI referred journal papers and over 200 international conference papers, as well as obtained more than 20 patents in China and USA. She has secured more than 20 external projects as Principal Investigator (PI)/ Project Coordinator (PC) and successfully obtained over HK$55 million of research grants. Prof. To holds various honorary positions in professional bodies including Board Member of the Asian Society for Precision Engineering and Nanotechnology (ASPEN), Committee Member of the Production Engineering Division of the Chinese Society for Mechanical Engineers (CSME) and Associate Member of the International Academy for Production Engineering (CIRP). She also serves as Editorial Board member in several international journals, such as International Journal of Machine Tools and Manufacturing, Journal of Applied Optics, Journal of Nano-manufacturing and Metrology, International Journal of Extreme Manufacturing and Chinese Journal of Mechanical.

Bibliographic Information

  • Book Title: Fabrication of Micro/Nano Structures via Precision Machining

  • Book Subtitle: Modelling, Processing and Evaluation

  • Editors: Guoqing Zhang, Bin Xu, Yanjun Lu, Suet To

  • DOI: https://doi.org/10.1007/978-981-99-1338-1

  • Publisher: Springer Singapore

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2023

  • Hardcover ISBN: 978-981-99-1337-4Published: 04 May 2023

  • Softcover ISBN: 978-981-99-1340-4Due: 18 May 2024

  • eBook ISBN: 978-981-99-1338-1Published: 03 May 2023

  • Edition Number: 1

  • Number of Pages: XII, 398

  • Number of Illustrations: 55 b/w illustrations, 221 illustrations in colour

  • Topics: Manufacturing, Machines, Tools, Processes, Industrial Chemistry/Chemical Engineering

Publish with us

Policies and ethics

Back to top

Search

Navigation