Abstract
Fully-Depleted (FD) Silicon-on-Insulator (SOI) MOSFET has been attracting significant attention from the past two decades due to its excellent immunity over short-dimension effects. This paper investigates the short-channel characteristics of gate-stack (GS) triple-metal-gate (TMG) recessed-source/drain (Re-S/D) FD SOI-MOSFET for analog-applications. Furthermore, the suitability of the GS-TMG: Re-S/D FD SOI MOSFET in the analog domain has been examined on the basis of different figure-of-merit metrics, such as; transconductance, transconductance-efficiency-factor, and output-conductance. Simultaneously, the device reliability issues at different temperatures have also been taken under study. All these studies have been carried out on the basis of numerical simulations over TCAD-Silvaco (ATLAS™). The simulation results reveal that the studied nanoscaled GS-TMG: Re-S/D fully-depleted SOI-MOSFET exhibits enhanced immunity over short-dimension-effects with improved transconductance behavior. Also, the device offers switching ratio (Ion/Ioff) of 1011.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
K.P. Pradhan, S.K. Mahapatra, P.K. Sahu, D.K. Behera, Impact of high-k gate dielectric on analog and RF performance of nanoscale DG MOSFET. Microelectron. J. 45(2), 144–151 (2004)
N.A. Srivastava, A. Priya, R.A. Mishra, Analog and radiofrequency performance of nanoscaled SOI MOSFET for RFIC based communication systems. Microelectron. J. 98, 104731 (2020)
H. Jian, S. Xubang, The design methodology and practice of low power SoC, in International Conference on Embedded Software and System Symposia (ICESS) (2008)
D.J. Frank, R.H. Dennard, E. Nowak, P.M. Solomon, Y. Taur, H.S.P. Wong, Device scaling limits of Si MOSFETs and their application dependencies. Proc. IEEE 89(3), 259–288 (2001)
R.R. Troutman, VLSI limitations from drain-induced barrier lowering. IEEE J. Solid-State Circuits 14(2), 383–391 (1979)
H. Krautscheider, A. Kohlhase, H. Terlezki, Scaling and reliability problems of gigabit CMOS circuits. Microelectron. Reliab. 37(1), 19–37 (1997)
International Technology Roadmap for Semiconductors (2015) [Online]. www.Itrs2.net
T. Ushiki, M. Yu, C.K. Kawai, T. Shinohara, K. Ino, M. Morita, T. Ohmi, Reduction of plasma-induced gate oxide using low-energy large-mass ion bombardment in gate-metal sputtering deposition, in Proceedings of 36th IEEE Inter Reliability Physics Symposium (1998)
Y.C. Yeo, Metal gate technology for nanoscale transistors—material selection and process integration issues. Thin Solid Films 462, 34–41 (2004)
N.A. Srivastava, R.A. Mishra, Linearity distortion assessment and small-signal behavior of nano-scaled SOI MOSFET for terahertz applications. ECS J. Solid State Sci. Technol. 8(12), N234–N244 (2019)
J.T. Park, J.P. Colinge, Multiple gate SOI MOSFETs: device design guidelines. IEEE Trans. Electron Devices 49(12), 2222–2229 (2002)
J.P. Colinge, Silicon-on-Insulator Technology, Material to VLSI, 2nd ed. (Kluwer Academic Publishers, 1997). ISBN 978-1-4757-2611-4
M. Saremi, A. Afzali-Kusha, S. Mohammadi, Ground plane fin-shaped field effect transistor (GP-FinFET): a FinFET for low leakage power circuits. Microelectron. Eng. 95, 74–82 (2012)
J.G. Fossum, J.Y. Choi, R. Sundaresan, SOI design for competitive CMOS VLSI. IEEE Trans. Electron Devices 37(3), 724–729 (1990)
W.J. Cho, C.G. Ahn, K. Im, J.H. Yang, J. Oh, I.B. Baek, S. Lee, Fabrication of 50-nm gate SOI n-MOSFETs using novel plasma-doping technique. IEEE Electron Device Lett. 25(6), 366–368 (2004)
N.A. Srivastava, V.K. Mishra, R.K. Chauhan, Analytical modelling of surface potential of modified source FD-SOI MOSFET, in IEEE International Conference on Emerging Trends in Communication Technologies (ETCT) (2016), pp. 1–4
U. Khan, B. Ghosh, M.W. Akram, A. Salimath, A comparative study of SELBOX-JLT and SOI-JLT. Appl. Phys. A 117(4), 2281–2288 (2014)
A. Priya, N.A. Srivastava, R.A. Mishra, Design of high speed and low-power ring oscillator circuit in recessed source/drain SOI technology. ECS J. Solid State Sci. Technol. 8(3), N47–N54 (2019)
M. Fei, L. Hong-Xia, F. Ji-Bin, W. Shu-Long, A two-dimensional threshold voltage analytical model for metal-gate/high-k/SiO2/Si stacked MOSFETs. Chin. Phys. B 21(10), 107306 (2012)
N.A. Srivastava, A. Priya, R.A. Mishra, Performance evaluation of hetero-gate-dielectric Re-S/D SOI MOSFET for low power applications, in 6th IEEE Uttar Pradesh Section International Conference (UPCON) (2019), pp. 1–6
K.K. Young, Short-channel effect in fully depleted SOI MOSFETs. IEEE Trans. Electron Devices 36(2), 399–402 (1989)
K. Suzuki, S. Pidin, Short-channel single-gate SOI MOSFET model. IEEE Trans. Electron Devices 50(5), 1297–1305 (2003)
K. Cheng, A. Khakifirooz, Fully depleted SOI (FDSOI) technology. Sci. China Inf. Sci. 59(6), 061402 (2016)
M.J. Kumar, A. Chaudhry, Two-dimensional analytical modeling of fully depleted DMG SOI MOSFET and evidence for diminished SCEs. IEEE Trans. Electron Dev. 51(4), 569–574 (2004)
N.A. Srivastava, A. Priya, R.A. Mishra, Design and analysis of nano-scaled SOI MOSFET-based ring oscillator circuit for high density ICs. Appl. Phys. A 125(8), 533 (2019)
Z. Zhang, S. Zhang, M. Chan, Self-align recessed source drain ultrathin body SOI MOSFET. IEEE Electron Device Lett. 25(11), 740–742 (2004)
B. Sviličić, V. Jovanović, T. Suligoj, Analytical models of front-and back-gate potential distribution and threshold voltage for recessed source/drain UTB SOI MOSFETs. Solid-State Electron. 53(5), 540–547 (2009)
A. Priya, R.A. Mishra, A two dimensional analytical modeling of surface potential in triple metal gate (TMG) fully-depleted recessed-source/drain (Re-S/D) SOI MOSFET. Superlattices Microstruct. 92, 316–329 (2016)
A. Priya, N.A. Srivastava, R.A. Mishra, Design and analysis of nano-scaled Recessed-S/D SOI MOSFET based pseudo-NMOS inverter for low-power electronics. J. Nanotechnol. 4935073, 1–12 (2019)
ATLAS User Manual, Device Simulation Software (Silvaco International, Santa Clara, 2016)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2022 The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
About this paper
Cite this paper
Srivastava, N.A., Priya, A., Mishra, R.A. (2022). Performance Analysis of Gate-Stack Nanoscaled Recessed-S/D SOI-MOSFET for Analog Applications. In: Dhawan, A., Tripathi, V.S., Arya, K.V., Naik, K. (eds) Recent Trends in Electronics and Communication. VCAS 2020. Lecture Notes in Electrical Engineering, vol 777. Springer, Singapore. https://doi.org/10.1007/978-981-16-2761-3_55
Download citation
DOI: https://doi.org/10.1007/978-981-16-2761-3_55
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-16-2760-6
Online ISBN: 978-981-16-2761-3
eBook Packages: EngineeringEngineering (R0)