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Performance Analysis of Gate-Stack Nanoscaled Recessed-S/D SOI-MOSFET for Analog Applications

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Recent Trends in Electronics and Communication (VCAS 2020)

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Abstract

Fully-Depleted (FD) Silicon-on-Insulator (SOI) MOSFET has been attracting significant attention from the past two decades due to its excellent immunity over short-dimension effects. This paper investigates the short-channel characteristics of gate-stack (GS) triple-metal-gate (TMG) recessed-source/drain (Re-S/D) FD SOI-MOSFET for analog-applications. Furthermore, the suitability of the GS-TMG: Re-S/D FD SOI MOSFET in the analog domain has been examined on the basis of different figure-of-merit metrics, such as; transconductance, transconductance-efficiency-factor, and output-conductance. Simultaneously, the device reliability issues at different temperatures have also been taken under study. All these studies have been carried out on the basis of numerical simulations over TCAD-Silvaco (ATLAS™). The simulation results reveal that the studied nanoscaled GS-TMG: Re-S/D fully-depleted SOI-MOSFET exhibits enhanced immunity over short-dimension-effects with improved transconductance behavior. Also, the device offers switching ratio (Ion/Ioff) of 1011.

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References

  1. K.P. Pradhan, S.K. Mahapatra, P.K. Sahu, D.K. Behera, Impact of high-k gate dielectric on analog and RF performance of nanoscale DG MOSFET. Microelectron. J. 45(2), 144–151 (2004)

    Article  Google Scholar 

  2. N.A. Srivastava, A. Priya, R.A. Mishra, Analog and radiofrequency performance of nanoscaled SOI MOSFET for RFIC based communication systems. Microelectron. J. 98, 104731 (2020)

    Google Scholar 

  3. H. Jian, S. Xubang, The design methodology and practice of low power SoC, in International Conference on Embedded Software and System Symposia (ICESS) (2008)

    Google Scholar 

  4. D.J. Frank, R.H. Dennard, E. Nowak, P.M. Solomon, Y. Taur, H.S.P. Wong, Device scaling limits of Si MOSFETs and their application dependencies. Proc. IEEE 89(3), 259–288 (2001)

    Article  Google Scholar 

  5. R.R. Troutman, VLSI limitations from drain-induced barrier lowering. IEEE J. Solid-State Circuits 14(2), 383–391 (1979)

    Article  Google Scholar 

  6. H. Krautscheider, A. Kohlhase, H. Terlezki, Scaling and reliability problems of gigabit CMOS circuits. Microelectron. Reliab. 37(1), 19–37 (1997)

    Article  Google Scholar 

  7. International Technology Roadmap for Semiconductors (2015) [Online]. www.Itrs2.net

  8. T. Ushiki, M. Yu, C.K. Kawai, T. Shinohara, K. Ino, M. Morita, T. Ohmi, Reduction of plasma-induced gate oxide using low-energy large-mass ion bombardment in gate-metal sputtering deposition, in Proceedings of 36th IEEE Inter Reliability Physics Symposium (1998)

    Google Scholar 

  9. Y.C. Yeo, Metal gate technology for nanoscale transistors—material selection and process integration issues. Thin Solid Films 462, 34–41 (2004)

    Article  Google Scholar 

  10. N.A. Srivastava, R.A. Mishra, Linearity distortion assessment and small-signal behavior of nano-scaled SOI MOSFET for terahertz applications. ECS J. Solid State Sci. Technol. 8(12), N234–N244 (2019)

    Article  Google Scholar 

  11. J.T. Park, J.P. Colinge, Multiple gate SOI MOSFETs: device design guidelines. IEEE Trans. Electron Devices 49(12), 2222–2229 (2002)

    Article  Google Scholar 

  12. J.P. Colinge, Silicon-on-Insulator Technology, Material to VLSI, 2nd ed. (Kluwer Academic Publishers, 1997). ISBN 978-1-4757-2611-4

    Google Scholar 

  13. M. Saremi, A. Afzali-Kusha, S. Mohammadi, Ground plane fin-shaped field effect transistor (GP-FinFET): a FinFET for low leakage power circuits. Microelectron. Eng. 95, 74–82 (2012)

    Article  Google Scholar 

  14. J.G. Fossum, J.Y. Choi, R. Sundaresan, SOI design for competitive CMOS VLSI. IEEE Trans. Electron Devices 37(3), 724–729 (1990)

    Article  Google Scholar 

  15. W.J. Cho, C.G. Ahn, K. Im, J.H. Yang, J. Oh, I.B. Baek, S. Lee, Fabrication of 50-nm gate SOI n-MOSFETs using novel plasma-doping technique. IEEE Electron Device Lett. 25(6), 366–368 (2004)

    Article  Google Scholar 

  16. N.A. Srivastava, V.K. Mishra, R.K. Chauhan, Analytical modelling of surface potential of modified source FD-SOI MOSFET, in IEEE International Conference on Emerging Trends in Communication Technologies (ETCT) (2016), pp. 1–4

    Google Scholar 

  17. U. Khan, B. Ghosh, M.W. Akram, A. Salimath, A comparative study of SELBOX-JLT and SOI-JLT. Appl. Phys. A 117(4), 2281–2288 (2014)

    Article  Google Scholar 

  18. A. Priya, N.A. Srivastava, R.A. Mishra, Design of high speed and low-power ring oscillator circuit in recessed source/drain SOI technology. ECS J. Solid State Sci. Technol. 8(3), N47–N54 (2019)

    Article  Google Scholar 

  19. M. Fei, L. Hong-Xia, F. Ji-Bin, W. Shu-Long, A two-dimensional threshold voltage analytical model for metal-gate/high-k/SiO2/Si stacked MOSFETs. Chin. Phys. B 21(10), 107306 (2012)

    Google Scholar 

  20. N.A. Srivastava, A. Priya, R.A. Mishra, Performance evaluation of hetero-gate-dielectric Re-S/D SOI MOSFET for low power applications, in 6th IEEE Uttar Pradesh Section International Conference (UPCON) (2019), pp. 1–6

    Google Scholar 

  21. K.K. Young, Short-channel effect in fully depleted SOI MOSFETs. IEEE Trans. Electron Devices 36(2), 399–402 (1989)

    Article  Google Scholar 

  22. K. Suzuki, S. Pidin, Short-channel single-gate SOI MOSFET model. IEEE Trans. Electron Devices 50(5), 1297–1305 (2003)

    Article  Google Scholar 

  23. K. Cheng, A. Khakifirooz, Fully depleted SOI (FDSOI) technology. Sci. China Inf. Sci. 59(6), 061402 (2016)

    Google Scholar 

  24. M.J. Kumar, A. Chaudhry, Two-dimensional analytical modeling of fully depleted DMG SOI MOSFET and evidence for diminished SCEs. IEEE Trans. Electron Dev. 51(4), 569–574 (2004)

    Google Scholar 

  25. N.A. Srivastava, A. Priya, R.A. Mishra, Design and analysis of nano-scaled SOI MOSFET-based ring oscillator circuit for high density ICs. Appl. Phys. A 125(8), 533 (2019)

    Article  Google Scholar 

  26. Z. Zhang, S. Zhang, M. Chan, Self-align recessed source drain ultrathin body SOI MOSFET. IEEE Electron Device Lett. 25(11), 740–742 (2004)

    Article  Google Scholar 

  27. B. Sviličić, V. Jovanović, T. Suligoj, Analytical models of front-and back-gate potential distribution and threshold voltage for recessed source/drain UTB SOI MOSFETs. Solid-State Electron. 53(5), 540–547 (2009)

    Article  Google Scholar 

  28. A. Priya, R.A. Mishra, A two dimensional analytical modeling of surface potential in triple metal gate (TMG) fully-depleted recessed-source/drain (Re-S/D) SOI MOSFET. Superlattices Microstruct. 92, 316–329 (2016)

    Article  Google Scholar 

  29. A. Priya, N.A. Srivastava, R.A. Mishra, Design and analysis of nano-scaled Recessed-S/D SOI MOSFET based pseudo-NMOS inverter for low-power electronics. J. Nanotechnol. 4935073, 1–12 (2019)

    Article  Google Scholar 

  30. ATLAS User Manual, Device Simulation Software (Silvaco International, Santa Clara, 2016)

    Google Scholar 

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Correspondence to Nilesh Anand Srivastava .

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Srivastava, N.A., Priya, A., Mishra, R.A. (2022). Performance Analysis of Gate-Stack Nanoscaled Recessed-S/D SOI-MOSFET for Analog Applications. In: Dhawan, A., Tripathi, V.S., Arya, K.V., Naik, K. (eds) Recent Trends in Electronics and Communication. VCAS 2020. Lecture Notes in Electrical Engineering, vol 777. Springer, Singapore. https://doi.org/10.1007/978-981-16-2761-3_55

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  • DOI: https://doi.org/10.1007/978-981-16-2761-3_55

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