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Numerical Characteristics of Silicon Nitride SiH4/NH3/H2 Plasma Discharge for Thin Film Solar Cell Deposition

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Proceedings of the 2nd International Conference on Electronic Engineering and Renewable Energy Systems (ICEERE 2020)

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 681))

Abstract

The creation of a uniform deposition requires a thorough study and understanding of the different characteristics of plasma discharge. In this work, we are interested in modeling a radiofrequency (RF) plasma discharge using silicon nitride gases SiH4/NH3/H2. The plasma equations are solved using the numerical finite element method until a periodic steady state is obtained. The numerical results show the fundamental characteristics of RF plasma between the two reactor electrodes. These characteristics allow us to describe the physics of plasma discharge so that physico-chemical processes can be implemented for more efficient and less costly deposition.

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Authors and Affiliations

  1. Department of Physics, LETSER Laboratory, University Mohamed First, Oujda, Morocco

    Meryem Grari & CifAllah Zoheir

Authors
  1. Meryem Grari
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  2. CifAllah Zoheir
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Corresponding author

Correspondence to Meryem Grari .

Editor information

Editors and Affiliations

  1. National School of Applied Sciences, Mohamed Premier University, Oujda, Morocco

    Bekkay Hajji

  2. Faculty of Sciences and Technology, Jijel University, Jijel, Algeria

    Adel Mellit

  3. DIEEI, University of Catania, CATANIA, Catania, Italy

    Giuseppe Marco Tina

  4. EEA Department of the Faculty of Sciences, University of Picardie Jules Verne, Amiens, France

    Abdelhamid Rabhi

  5. Laboratory for Analysis and Architecture of Systems, Toulouse, France

    Jerome Launay

  6. National School of Applied Sciences, Oujda Mohammed Premier University, Oujda, Morocco

    Salah Eddine Naimi

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Grari, M., Zoheir, C. (2021). Numerical Characteristics of Silicon Nitride SiH4/NH3/H2 Plasma Discharge for Thin Film Solar Cell Deposition. In: Hajji, B., Mellit, A., Marco Tina, G., Rabhi, A., Launay, J., Naimi, S. (eds) Proceedings of the 2nd International Conference on Electronic Engineering and Renewable Energy Systems. ICEERE 2020. Lecture Notes in Electrical Engineering, vol 681. Springer, Singapore. https://doi.org/10.1007/978-981-15-6259-4_22

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  • DOI: https://doi.org/10.1007/978-981-15-6259-4_22

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-15-6258-7

  • Online ISBN: 978-981-15-6259-4

  • eBook Packages: EnergyEnergy (R0)

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