Skip to main content

Nonvolatile Ferroelectric Memory Thin-Film Transistors Using a Poly(Vinylidene Fluoride Trifluoroethylene) Gate Insulator and an Oxide Semiconductor Active Channel

  • Chapter
  • First Online:
Ferroelectric-Gate Field Effect Transistor Memories

Part of the book series: Topics in Applied Physics ((TAP,volume 131))

  • 2619 Accesses

Abstract

Nonvolatile memory thin-film transistor using an organic ferroelectric gate insulator and oxide semiconductor active channel is proposed as a promising memory elements embedded onto the next-generation flexible and transparent electronic systems. In this chapter, some important technical issues for this device, such as device structure, process optimization and memory array integration, are extensively discussed. Feasible applications and remaining technological issues to be solved for practical applications are also reviewed.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 99.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 129.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. H.S. Nalwa, Ferroelectric Polymers (Dekker, New York, 1995)

    Google Scholar 

  2. T. Furukawa, Phase. Trans. 18, 143 (1989)

    Article  Google Scholar 

  3. R.G. Kepler, R.A. Anderson, Adv. Phys. 41, 1 (1991)

    Article  ADS  Google Scholar 

  4. S. Horiuchi, Y. Tokunaga, G. Giovannetti, S. Picozzi, H. Itoh, R. Shimano, R. Kumai, Y. Tokura, Nature 463, 789 (2010)

    Article  ADS  Google Scholar 

  5. R.C.G. Naber, P.W.M. Blom, A.W. Marsman, D.M. Leeuw, Appl. Phys. Lett. 85, 2032 (2004)

    Article  ADS  Google Scholar 

  6. F. Fang, W. Yang, C. Jia, X. Luo, Appl. Phys. Lett. 92, 222906 (2008)

    Article  ADS  Google Scholar 

  7. K. Muller, D. Mandal, K. Henkel, L. Paloumpa, D. Schmeisser, Appl. Phys. Lett. 93, 112901 (2008)

    Article  ADS  Google Scholar 

  8. T. Furukawa, T. Nakajima, Y. Takahashi, I.E.E.E. Dielectr, Electr. Insul. 13, 1120 (2006)

    Google Scholar 

  9. H. Xu, X. Liu, X. Fang, H. Xie, G. Li, X. Meng, J. Sun, J. Chu, J. Appl. Phys. 105, 034107 (2009)

    Article  ADS  Google Scholar 

  10. H. Xu, J. Zong, X. Liu, J. Chen, D. Shen, Appl. Phys. Lett. 90, 092903 (2007)

    Article  ADS  Google Scholar 

  11. R.C.G. Naber, C. Tanase, P.W.M. Blom, G.H. Gelinck, A.W. Marsman, F.J. Touwslager, S. Setayesh, D.M. Leeuw, Nature Mater. 4, 243 (2005)

    Article  ADS  Google Scholar 

  12. K.H. Lee, G.B. Lee, K. Lee, M.S. Oh, S. Im, Appl. Phys. Lett. 94, 093304 (2009)

    Article  ADS  Google Scholar 

  13. R. Schroeder, L.A. Majewski, M. Grell, Adv. Mater. 16, 633 (2004)

    Article  Google Scholar 

  14. K.N.N. Uni, R. Bettignies, S.D. Seignon, J. Nunzi, Appl. Phys. Lett. 85, 1823 (2004)

    Article  ADS  Google Scholar 

  15. R.C.G. Naber, B. Boer, P.W.M. Blom, D.M. Leeuw, Appl. Phys. Lett. 87, 203509 (2005)

    Article  ADS  Google Scholar 

  16. K. Muller, K. Henkel, I. Paloumpa, D. Schmeiber, Thin Solid Film 515, 7683 (2007)

    Article  ADS  Google Scholar 

  17. S.J. Kang, Y.J. Park, J. Sung, P.S. Jo, C. Park, K.J. Kim, B.O. Cho, Appl. Phys. Lett. 92, 012921 (2008)

    Article  ADS  Google Scholar 

  18. C.A. Nguyen, S.G. Mhaisalkar, J. Ma, P.S. Lee, Org. Electron. 9, 1087 (2008)

    Article  Google Scholar 

  19. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, Nature 432, 488 (2004)

    Article  ADS  Google Scholar 

  20. R.B.M. Cross, M.M. Souza, S.C. Deane, N.D. Young, I.E.E.E. Trans, Electron Dev. 55, 1109 (2008)

    Article  ADS  Google Scholar 

  21. A. Suresh, J.F. Muth, Appl. Phys. Lett. 92, 033502 (2008)

    Article  ADS  Google Scholar 

  22. J.K. Jeong, H.W. Yang, J.H. Jeong, Y.G. Mo, H.D. Kim, Appl. Phys. Lett. 93, 123508 (2008)

    Article  ADS  Google Scholar 

  23. K. Hoshino, D. Hong, H.Q. Chiang, J.F. Wager, I.E.E.E. Trans, Electron Dev. 56, 1365 (2009)

    Article  ADS  Google Scholar 

  24. K. Nomura, T. Kamiya, M. Hirano, H. Hosono, Appl. Phys. Lett. 95, 013502 (2009)

    Article  ADS  Google Scholar 

  25. J.M. Lee, I.T. Cho, J.H. Lee, H.I. Kwon, Appl. Phys. Lett. 93, 093504 (2008)

    Article  ADS  Google Scholar 

  26. S.M. Yoon, S.H. Yang, S.H.K. Park, S.W. Jung, D.H. Cho, C.W. Byun, S.Y. Kang, C.S. Hwang, B.G. Yu, J. Phys. D Appl. Phys. 42, 245101 (2009)

    Article  ADS  Google Scholar 

  27. E. Tokumitsu, K. Okamoto, H. Ishiwara, Jpn. J. Appl. Phys. 39, 2125 (2001)

    Article  ADS  Google Scholar 

  28. S.M. Yoon, S.H. Yang, C.W. Byun, S.H.K. Park, S.W. Jung, D.H. Cho, S.Y. Kang, C.S. Hwang, B.G. Yu, Jpn. J. Appl. Phys. 49, 04DJ06 (2010)

    Google Scholar 

  29. S.M. Yoon, S.H. Yang, S.W. Jung, C.W. Byun, S.H.K. Park, C.S. Hwang, G.G. Lee, E. Tokumitsu, H. Ishiwara, Appl. Phys. Lett. 96, 232903 (2010)

    Article  ADS  Google Scholar 

  30. Z. Hu, M. Tian, B. Nysten, A.M. Jonas, Nat. Mater. 8, 62 (2008)

    Article  ADS  Google Scholar 

  31. L. Zhang, S. Ducharme, J. Li, Appl. Phys. Lett. 91, 172906 (2007)

    Article  ADS  Google Scholar 

  32. Z. Hu, G. Baralia, V. Bayot, J.F. Gohy, A.M. Jonas, Nano Lett. 5, 1738 (2005)

    Article  ADS  Google Scholar 

  33. V.S. Bystrov, I.K. Bdikin, D.A. Kiselev, S. Yudin, V.M. Fridkin, V.M. Kholkin, J. Phys. D Appl. Phys. 40, 4571 (2007)

    Article  ADS  Google Scholar 

  34. B.J. Rodriguez, S. Jesse, S.V. Kalinin, J. Kim, S. Ducharme, V.M. Fridkin, Appl. Phys. Lett. 90, 122904 (2007)

    Article  ADS  Google Scholar 

  35. C. Rankin, C. Chou, D. Conklin, D.A. Bonnel, ACS Nano 1, 234 (2007)

    Article  Google Scholar 

  36. S.M. Yoon, S.W. Jung, S.H. Yang, S.Y. Kang, C.S. Hwang, B.G. Yu, Jpn. J. Appl. Phys. 48, 09KA20 (2009)

    Google Scholar 

  37. S.H.K. Park, D.H. Cho, C.S. Hwang, S. Yang, M.K. Ryu, C.W. Byun, S.M. Yoon, W.S. Cheong, K.I. Cho, J.H. Jeon, ETRI J. 31, 653 (2009)

    Article  Google Scholar 

  38. S.H.K. Park, C.S. Hwang, M. Ryu, S. Yang, C. Byun, J. Shin, J. Lee, K. Lee, M.S. Oh, S. Im, Adv. Mater. 21, 678 (2009)

    Article  Google Scholar 

  39. S.M. Yoon, S.H.K. Park, C.W. Byun, S.H. Yang, C.S. Hwang, J. Electrochem. Soc. 157, H727 (2010)

    Article  Google Scholar 

  40. S.M. Yoon, S.H.K. Park, S.H. Yang, C.W. Byun, C.S. Hwang, Electrochem. Solid State Lett. 13, H624 (2010)

    Google Scholar 

  41. M.G. Kim, H.S. Kim, Y.G. Ha, J. He, M.G. Kanatzidis, A. Facchetti, T.J. Marks, J. Am. Ceram. Soc. 132, 10532 (2010)

    Google Scholar 

  42. W.H. Jeong, G.H. Kim, H.S. Shin, B.D. Ahn, H.J. Kim, M.K. Ryu, K.B. Park, J.B. Seon, S.Y. Lee, Appl. Phys. Lett. 96, 093503 (2010)

    Article  ADS  Google Scholar 

  43. H.S. Shin, G.H. Kim, W.H. Jeong, B.D. Ahn, H.J. Kim, Jpn. J. Appl. Phys. 49, 03CB01 (2010)

    Google Scholar 

  44. J.H. Jeon, Y.H. Hwang, B.S. Bae, K.L. Kown, H.J. Kang, Appl. Phys. Lett. 96, 212109 (2010)

    Article  ADS  Google Scholar 

  45. M.K. Ryu, K.B. Park, J.B. Seon, J. Park, I.S. Kee, Y.G. Lee, S.Y. Lee, in SID International Symposium Digestive Technical Papers (2009), p. 188

    Google Scholar 

  46. S.M. Yoon, S.W. Jung, S.H. Yang, C.W. Byun, C.S. Hwang, H. Ishiwara, J. Electrochem. Soc. 157, H771 (2010)

    Article  Google Scholar 

  47. S.M. Yoon, S.H. Yang, S.W. Jung, C.W. Byun, S.H.K. Park, C.S. Hwang, H. Ishiwara, Electrochem. Solid State Lett. 13, H141 (2010)

    Article  Google Scholar 

  48. S.M. Yoon, S.W. Jung, S.H. Yang, C.W. Byun, C.S. Hwang, S.H.K. Park, H. Ishiwara, Org. Electron. 11, 1746 (2010)

    Article  Google Scholar 

  49. J.Y. Bak, S.M. Yoon, J. Vac. Sci. Technol. B 31, 040601 (2013)

    Article  Google Scholar 

  50. J.Y. Bak, S.W. Jung, S.M. Yoon, Org. Electron. 14, 2148 (2013)

    Article  Google Scholar 

  51. K.K. Banger, Y. Yamashita, K. Mori, R.L. Peterson, T. Leedham, J. Rickard, H. Sirringhaus, Nature Mater. 10, 45 (2011)

    Article  ADS  Google Scholar 

  52. M.G. Kim, M.G. Kanatzidis, A. Facchetti, T.J. Marks, Nature Mater. 10, 382 (2011)

    Article  ADS  Google Scholar 

  53. Y.H. Kim, J.S. Heo, T.H. Kim, S. Park, M.H. Yoon, J. Kim, M.S. Oh, G.R. Yi, Y.Y. Noh, S.K. Park, Nature 489, 128 (2012)

    Article  ADS  Google Scholar 

  54. T. Someya, Y. Kato, S. Iba, Y. Noguchi, T. Sekitani, H. Kawaguchi, T. Sakurai, I.E.E.E. Trans, Electron Dev. 52, 2502 (2005)

    Article  ADS  Google Scholar 

  55. K.L. Lin, K. Jain, IEEE Electron Dev. Lett. 30, 14 (2009)

    Article  ADS  Google Scholar 

  56. T. Sekitani, T. Yokota, U. Zschieschang, H. Klauk, S. Bauer, K. Takeuchi, M. Takamiya, M. Sakurai, T. Someya, Science 326, 1516 (2009)

    Article  ADS  Google Scholar 

  57. G.H. Gelinck, D.M. Leeuw, Nature Mater. 3, 106 (2004)

    Article  ADS  Google Scholar 

  58. T. Sekitani, H. Nakajima, H. Maeda, T. Fukushima, T. Aida, K. Hata, T. Someya, Nature Mater. 8, 494 (2009)

    Article  ADS  Google Scholar 

  59. S.R. Forrest, Nature 428, 911 (2004)

    Article  ADS  Google Scholar 

  60. P.F. Baude, D.A. Ender, M.A. Haase, T.W. Kelley, D.Y. Muyres, S.D. Theiss, Appl. Phys. Lett. 82, 3964 (2003)

    Article  ADS  Google Scholar 

  61. M. Jung, J. Kim, J. Noh, N. Lim, C. Lim, G. Lee, J. Kim, H. Kang, K. Jung, A.D. Leonard, J.M. Tour, G. Cho, I.E.E.E. Trans, Electron Dev. 57, 571 (2010)

    Article  ADS  Google Scholar 

  62. H. Klauk, M. Halik, U. Zschieschang, F. Eder, D. Rohde, G. Schmid, C. Dehm, I.E.E.E. Trans, Electron Dev. 52, 618 (2015)

    Article  ADS  Google Scholar 

  63. I.M. Graz, S.P. Lacour, Appl. Phys. Lett. 95, 243305 (2009)

    Article  ADS  Google Scholar 

  64. U. Zschieschang, F. Ante, T. Yamamoto, K. Takamiya, H. Kuwabara, M. Ikeda, T. Sekitani, T. Someya, K. Kern, H. Klauk, Adv. Mater. 22, 982 (2010)

    Article  Google Scholar 

  65. T. Sekitani, K. Zaitsu, Y. Noguchi, K. Ishibe, M. Takamiya, T. Sakurai, T. Someya, I.E.E.E. Trans, Electron Dev. 56, 1027 (2009)

    Article  ADS  Google Scholar 

  66. S.T. Han, Y. Zhou, V.A.L. Roy, Adv. Mater. 25, 5425 (2013)

    Article  Google Scholar 

  67. D. Son, J. Lee, S. Qiao, R. Ghaffari, J. Kim, J.E. Lee, C. Song, S.J. Kim, D.J. Lee, S.W. Jun, S. Yang, M. Park, J. Shin, K. Do, M. Lee, K. Kang, C.S. Hwang, N. Lu, T. Hyeon, D.H. Kim, Nature Nanotech. 9, 397 (2014)

    Article  ADS  Google Scholar 

  68. S. Kim, J.H. Son, S.H. Lee, B.K. You, K.I. Park, H.K. Lee, M. Byun, K.J. Lee, Adv. Mater. 26, 7480 (2014)

    Article  Google Scholar 

  69. S.M. Yoon, S.W. Jung, S. Yang, S.H.K. Park, B.G. Yu, H. Ishiwara, Curr. Appl. Phys. 11, S219 (2011)

    Article  Google Scholar 

  70. S.M. Yoon, S. Yang, S.H.K. Park, J. Electrochem. Soc. 158, H892 (2011)

    Article  Google Scholar 

  71. H. Yin, S. Kim, C.J. Kim, I. Song, J. Park, S. Kim, Y. Park, Appl. Phys. Lett. 93, 172109 (2008)

    Article  ADS  Google Scholar 

  72. A. Suresh, S. Novak, P. Wellenius, V. Misra, J.F. Muth, Appl. Phys. Lett. 94, 123501 (2009)

    Article  ADS  Google Scholar 

  73. J.W. Seo, J.W. Park, K.S. Lim, J.H. Yang, S.J. Kang, 93, 223505 (2008)

    Google Scholar 

  74. J.W. Seo, J.W. Park, K.S. Lim, S.J. Kang, Y.H. Hong, J.H. Yang, L. Fang, G.Y. Sung, H.K. Kim, Appl. Phys. Lett. 95, 133508 (2009)

    Article  ADS  Google Scholar 

  75. L. Shi, D. Shang, J. Sun, B. Sun, Appl. Phys. Express 2, 101602 (2009)

    Article  ADS  Google Scholar 

  76. K.S. Yook, J.Y. Lee, S.H. Kim, J. Jang, Appl. Phys. Lett. 92, 223305 (2008)

    Article  ADS  Google Scholar 

  77. K.S. Yook, J.Y. Lee, Thin Solid Film 517, 5573 (2009)

    Article  ADS  Google Scholar 

  78. S.M. Yoon, S. Yang, C. Byun, S.H.K. Park, D.H. Cho, S.W. Jung, O.S. Kwon, C.S. Hwang, Adv. Funct. Mater. 20, 921 (2010)

    Article  Google Scholar 

  79. N. Ueda, Y. Ogawa, K. Tanaka, K. Yamamoto, Y. Yamauchi, in SID International Symposium Digestive Technical Papers (2010), p. 615

    Google Scholar 

  80. L.W. Chu, P.T. Liu, M.D. Ker, G.T. Zheng, Y.H. Li, C.H. Kuo, C.H. Li, Y.J. Hsieh, C.T. Liu, in SID International Symposium Digestive Technical Papers (2010), p. 1363

    Google Scholar 

  81. S.H. Lee, J. Kim, S.H. Yoon, K.A. Kim, S.M. Yoon, C. Byun, C.S. Hwang, G.H. Kim, K.I. Cho, S.W. Lee, IEEE Electron Dev. Lett. 36, 585 (2015)

    Article  ADS  Google Scholar 

  82. S.M. Yoon, C.W. Byun, S. Yang, S.H.K. Park, D.H. Cho, S.W. Jung, S.Y. Kang, C.S. Hwang, IEEE Electron Dev. Lett. 31, 138 (2010)

    Article  ADS  Google Scholar 

  83. S.M. Yoon, S. Yang, M.K. Ryu, C.W. Byun, S.W. Jung, S.H.K. Park, C.S. Hwang, K.I. Cho, I.E.E.E. Trans, Electron Dev. 58, 2135 (2011)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Sung-Min Yoon .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2016 Springer Science+Business Media Dordrecht

About this chapter

Cite this chapter

Yoon, SM. (2016). Nonvolatile Ferroelectric Memory Thin-Film Transistors Using a Poly(Vinylidene Fluoride Trifluoroethylene) Gate Insulator and an Oxide Semiconductor Active Channel. In: Park, BE., Ishiwara, H., Okuyama, M., Sakai, S., Yoon, SM. (eds) Ferroelectric-Gate Field Effect Transistor Memories. Topics in Applied Physics, vol 131. Springer, Dordrecht. https://doi.org/10.1007/978-94-024-0841-6_10

Download citation

  • DOI: https://doi.org/10.1007/978-94-024-0841-6_10

  • Published:

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-024-0839-3

  • Online ISBN: 978-94-024-0841-6

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

Publish with us

Policies and ethics