Abstract
The hyperfine interaction between the atomic nucleus and its surrounding charge and electromagnetic field distribution is extremely sensitive to the atomic and electronic configuration of this atom. In the field of defects and impurities in semiconductors, the study of their hyperfine interaction can therefore contribute substantially to their identification and characterization. The introduction of radioactive isotopes as impurity atoms allows to probe the hyperfine interaction of extremely low quantities of such impurities. Several dedicated nuclear methods such as Mössbauer Spectroscopy, Perturbed Angular Correlations and Low Temperature Nuclear Orientation allow to measure the hyperfine interaction at the nuclear site of the impurity atom by analysing the radiation emitted by these probe nuclei. The Emission Channelling technique, on the other hand, allows studying the precise lattice site location of the probe atoms from the channelling behaviour of the particles emitted by these probe nuclei.
In the first part of this chapter we will describe the basic principles of these nuclear methods and illustrate them with a few relevant examples.
In the second part of this chapter we will focus on a series of recent Mössbauer spectroscopy studies which have been set up to study 57Fe solute atoms in Si wafers and solar cells under special conditions such as under applied voltage and external illumination. Finally, we will describe the basic principles of a Mössbauer microscope, allowing to map the presence of Fe across a Si wafer.
References
Schatz, G., Weidinger, A.: Nuclear Condensed Matter Physics: Nuclear Methods and Applications. Wiley, New York (1995)
Langouche, G. (ed.): Hyperfine Interaction of Defects in Semiconductors. Elsevier, Amsterdam (1992)
Mössbauer, R.L.: Gammastrahlung in Ir191. Zeitschrift für Physik A 151, 124–143 (1958)
Cohen, R.L. (ed.): Applications of Mössbauer Spectroscopy: Volume 1. Academic Press, New York (1976)
Wikipedia. Mössbauer Spectroscopy
Yoshida, Y., Langouche, G. (eds.): Mössbauer Spectroscopy: Tutorial Book. Springer, Berlin (2013)
Langouche, G., de Potter, M., Dézsi, I., Van Rossum, M.: Mössbauer study of the microscopic surrounding of Co atoms implanted in Si and Ge below the full amorphization limit. Radiat. Eff. Lett. 67, 101–106 (1982)
Latshaw, G.L.: A Mössbauer effect study of iron implanted into silicon, diamond and germanium. PhD thesis, Stanford University (1971)
Latshaw, G.L., Russell, P.B., Hanna, S.S.: In-beam implantation of iron into germanium, silicon and diamond studied by the Mössbauer effect. Hyperfine Interact. 8, 105–127 (1980)
Sawicka, B.D., Sawicki, J.A.: Evidence of the electric quadrupole coupling of 57Fe implanted in silicon. Phys. Lett. A64, 311–312 (1977)
Sawicki, J.A., Sawicka, B.D.: Correlation of isomer shift, quadrupole coupling and interatomic distance in group-IV elements. Phys. Stat. Sol. B 86, K159–K161 (1978)
Langouche, G., de Potter, M.: Identification of substitutional and interstitial Co implanted in Si. Nucl. Instrum. Methods Phys. Res. B 19(20), 322–324 (1987)
Schwalbach, P., Laubach, S., Hartick, M., Kankeleit, E., Keck, B., Menningen, M., Sielemann, R.: Diffusion and isomer shift of interstitial iron in silicon observed via in-beam Mössbauer spectroscopy. Phys. Rev. Lett. 64, 1274–1277 (1990)
Gunnlaugsson, H.P., Weyer, G., Dietrich, M., Fanciulli, M., Bharuth-Ram, K., Sielemann, R., and the ISOLDE Collaboration: Charge state dependence of the diffusivity of interstitial Fe in silicon detected by Mössbauer spectroscopy. Appl. Phys. Lett. 80, 2657–2659 (2002)
Wichert, T., Swanson, M.L., Queneville, A.F.: Formation of In-As complexes in silicon observed by the perturbed angular correlation technique. Phys. Rev. Lett. 57, 1757–1760 (1986)
Sugimoto, K., Mizobuchi, A., Nakai, K., Matuda, K.: Nuclear magnetic resonance of polarized 17F formed through the reaction. Phys. Lett. 18, 38–39 (1965)
http://isolde.web.cern.ch courtesy of M. Stachura
Minamisono, T., Nojiri, Y., Deutch B.I., Asahi K.: Hyperfine interactions of polarized -emitting and in Si, Ge and GaP. Hyperfine Interact. 15(16), 543 (1983)
Metzner, H., Sulzer, G., Seelinger, W., Ittermann, B., Frank, H.-P., Fischer, B., Ergezinger, K.-H., Dippel, R., Diehl, E., Stockmann, H.-J., Ackermann, H.: Bulk-doping-controlled implantation site of boron in silicon. Phys. Rev. B 42, 11419–11422 (1990)
Wolf, H., Wagner, F., Wichert, T.: Anomalous diffusion profiles of Ag in CdTe due to chemical self-diffusion. Phys. Rev. Lett. 94, 125901 (2005)
Achtziger, N., Forkel-Wirth, D., Grillenberger, J., Licht, T., Witthuhn, W.: Identification of deep bandgap states in 4H- and 6H-SiC by radio-tracer DLTS and PAC-spectroscopy. Nucl. Instr. Meth. Phys. Res. B. 136, 756–762 (1998)
Johnston, K., Henry, M.O., McCabe, D., McGlynn, E., Dietrich, M., Alves, E., Xia, M.: Identification of donor-related impurities in ZnO using photoluminescence and radiotracer techniques. Phys. Rev. B 73, 165212 (2006)
Von Nathusius, C., Vianden, R.: Hall effect measurements on transmutation doped semiconductors. Hyperfine Interact. 129, 391–400 (2000)
http://isolde.web.cern.ch courtesy of U. Wahl
Wahl, U., Correia, J.G., Czermak, A., Jahn, S.G., Jalocha, P., Marques, J.G., Rudge, A., Schopper, F., Soares, J.C., Vantomme, A., Weilhammer, P., and the ISOLDE Collaboration: Position-sensitive Si pad detectors for electron emission channeling experiments. Nucl. Instr. Meth. Phys. Res. A. 524, 245–256 (2004)
Wahl, U., Vantomme, A., Langouche, G., Marques, J., Correia, J.G.: Direct evidence for tetrahedral interstitial Er in Si. Phys. Rev. Lett. 79, 2069–2072 (1997)
Wahl, U., Correia, J.G., Rita, E., Araujo, J.P., Soares, J.C.: Lattice sites of implanted Fe in Si. Phys. Rev. B 72, 014115 (2005)
Istratov, A.A., Hieslmair, H., Weber, E.R.: Iron and its complexes in silicon. Appl. Phys. A 69, 13–44 (1999)
Istratov, A.A., Hieslmair, H., Weber, E.R.: Iron contamination in silicon technology. Appl. Phys. A 70, 489–534 (2000)
Macdonald, D., Tan, J., Trupke, T.: Imaging interstitial iron concentrations in boron-doped crystalline silicon using photoluminescence. J. Appl. Phys 103, 073710–073717 (2008)
Schubert, M.C., Kerler, M.J., Warta, W.: Influence of heterogeneous profiles in carrier density measurements with respect to iron concentration measurements in silicon. J. Appl. Phys 105, 114903–114906 (2009)
Zoth, G., Bergholz, W.: A fast, preparation-free method to detect iron in silicon. J. Appl. Phys. 67, 6764–6771 (1990)
Langouche, G.: Characterization of semiconductors by Mössbauer spectroscopy. In: Long, G.L., Grandjean, F. (eds.) Mössbauer Spectroscopy Applied to Inorganic Chemistry, vol. 3, pp. 445–512. Plenum Press, New York (1989)
Gilles, D., Schroter, W., Bergholz, W.: Impact of the electronic structure on the solubility and diffusion of 3d transition elements in silicon. Phys. Rev. B 41, 5770–5782 (1990)
Langouche, G., Yoshida, Y.: Ion implantation. In: Yoshida, Y., Langouche, G. (eds.) Mössbauer Spectroscopy – Tutorial Book, pp. 267–303. Springer, Berlin (2013)
Yoshida, Y., Shimura, F.: In-situ observation of diffusion and segregation of Fe atoms in Si crystals at high temperature by Mössbauer spectroscopy. In: Huff, H.R., Gösele, U., Tsuya, H. (eds.) Proceedings of 8th International Symposium on Silicon Materials Science and Technology, vol. 98-1, pp. 984–996. ECS, San Diego (1998)
Yoshida, Y.: Direct observation of substitutional and interstitial Fe atoms in Si by high-temperature and in-beam Mössbauer spectroscopy. In: PV2003-03 of ECS, ALTECH 2003 Analytical and Diagnostic Techniques for Semiconductor Materials and Processes, 479–482. Salt Lake City (2003)
Yoshida, Y., Ogawa, S., Arikawa, K.: Direct observation of substitutional Fe atoms in Si and SOI wafers at 1273 K. Physica B 340–342, 605–608 (2003)
Yoshida, Y., Horie, S., Niira, K., Fukui, K., Shirasawa, K.: In-situ observation of iron atoms in multicrystalline silicon at 1273 K and 300 K by Mössbauer spectroscopy. Physica B 376–377, 226–230 (2006)
Yoshida, Y., Aoki, S., Sakata, K., Suzuki, Y., Adachi, M., Suzuki, K.: Iron impurities in multicrystalline silicon studied by Mössbauer spectroscopy. Physica B 401–402, 119–122 (2007)
Yoshida, Y., Suzuki, Y., Matsushita, A., Suzuki, K., Sakata, K.: Fermi level dependence of Mössbauer spectroscopic components corresponding to iron interstitials and their clusters in silicon. Physica B 401–402, 167–170 (2007)
Yoshida, Y., Kobayashi, Y., Hayakawa, K., Yukihira, K., Shimura, F., Yoshida, A., Diao, X., Ogawa, H., Yano, Y., Ambe, F.: In-beam Mössbauer study on interstitial and substitutional 57Mn/57Fe jumps in Si. Defect Diffus. Forum 194–199, 611 (2001)
Yoshida, Y., Kobayashi, Y., Yoshida, A., Diao, X., Ogawa, S., Hayakawa, K., Yukihira, K., Shimura, F., Ambe, F.: In-beam Mössbauer spectroscopy after GeV-Ion implantation at an on-line projectile-fragments separator. Hyperfine Interact. 141–142, 157–162 (2002)
Yoshida, Y., Kobayashi, Y., Hayakawa, K., Yukihira, K., Yoshida, A., Ueno, H., Shimura, F., Ambe, F.: In-situ observation of substitutional and interstitial Fe atoms in Si after GeV-implantation: an in-beam Mossbauer study. Physica B 376–377, 69–72 (2006)
Yoshida, Y., Kobayashi, Y., Yukihira, K., Hayakawa, K., Suzuki, K., Yoshida, A., Ueno, H., Yoshimi, A., Shimada, K., Nagae, D., Asahi, K., Langouche, G.: 57Fe diffusion in n-type Si after GeV implantation of 57Mn. Physica B 401–402, 101–104 (2007)
Yoshida, Y., Suzuki, K., Kobayashi, Y., Nagatomo, T., Akiyama, Y., Yukihira, K., Hayakawa, K., Ueno, H., Yoshimi, A., Nagae, D., Asahi, K., Langouche, G.: 57Fe charge state in mc-Si solar cells under light illumination after GeV- implantation of 57Mn. Hyperfine Interact. 204, 133–137 (2011)
Suzuki, K., Yoshida, Y., Kamimura, T., Ichino, M., Asahi, K.: Iron diffusion in silicon under external stress. Physica B 404, 4678–4680 (2009)
Suzuki, K., Yoshida, Y., Hayakawa, K., Yukihira, K., Ichino, M., Asahi, K.: Observation of iron impurity diffusion in silicon under bending stress by Mössbauer spectroscopy. Hyperfine Interact. 197, 213–217 (2010)
Yoshida, Y., Tsukamoto, Y., Ichino, M., Tanaka, K.: Direct observation of carrier trapping processes on Fe impurities in mc-Si solar cells. Solid State Phenom. 205–206, 40–46 (2014)
Tanaka, K., Watanabe, T., Uenoyama, T., Ino, Y., Yoshida, Y.: Search for FeB pairs in B-highly doped Si wafers by Mössbauer spectroscopy. In: Proceedings of the 7th Forum on the Science and Technology of Silicon Materials, 107–111 (2014)
Ino, Y., Tanaka, K., Yoshida, Y.: Direct observations of Fe impurities in Si with different Fermi levels by Mössbauer spectroscopy. Solid State Phenom. 242, 205–210 (2016)
Yoshida, Y., Ino, Y., Tanaka, K.: Mössbauer spectroscopy on Fe impurities in Si materials. Solid State Phenom. 242, 211–217 (2016)
Yoshida, Y., Suzuki, K., Hayakawa, K., Yukihira, K., Soejima, H.: Mössbauer spectroscopic microscope. Hyperfine Interact. 188, 121–126 (2009)
Yoshida, Y., Kamimura, T., Ichino, M., Hayakawa, K., Yukihira, K., Soejima, H.: Mössbauer spectroscopic microscope. J. Phys. Conf. Ser. 217, 012003–012004 (2010)
Yoshida, Y., Hayakawa, K., Yukihira, K., Ichino, M., Akiyama, Y., Kumabe, H., Soejima, H.: Development and applications of “Mössbauer cameras”. Hyperfine Interact. 198, 23–29 (2010)
Hayakawa, K., Tsukamoto, Y., Akiyama, Y., Kurata, M., Yukihira, K., Soejima, H., Yoshida, Y.: Deployment of system and technology for Mössbauer spectroscopic microscope. Hyperfine Interact. 206, 79–82 (2012)
Tanaka, K., Akiyama, Y., Hayakawa, K., Yukihira, K., Yoshida, Y.: Mapping analyses of Fe-diffused mc-Si using Mössbauer microscope and photo- luminescence. Hyperfine Interact. 206, 75–78 (2012)
Kamimura, T., Udono, H., Yoshida, Y.: not published (2008); Kaminura, T.: Master thesis, Shizuoka Institute of Science and Technology, Japan (2009)
Yoshida, Y., Ino, Y.: To be published (2015)
Kübler, J., Kumm, A.E., Overhof, H., Schwalbach, P., Hartick, M., Kankeleit, E., Keck, B., Wende, L., Sielemann, R.: Isomer-shift of interstitial and substitutional iron in silicon and germanium. Z. Phys. B 92, 155–162 (1993)
Coutinho, J.: Private communication (2015)
Estreicher, S.K., Sanati, M., Gonzalez Szwacki, N.: Iron in silicon: interactions with radiation defects, carbon, and oxygen. Phys. Rev. B 77, 125214–125219 (2008)
Backlund, D.J., Estreicher, S.K.: Ti, Fe and Ni in Si and their interactions with the vacancy and the A center: a theoretical study. Phys. Rev. B 81, 235213–235218 (2010)
Ziegler, J.F., Biersack, J.P.: In SRIM – The stopping and range of ions in solids, http://www.srim.org/ (2009)
Dattagupta, S.: Time-dependent effects and relaxation in Mössbauer spectroscopy. In: Dickson, D.P.E., Berry, F. (eds.) Mössbauer Spectroscopy, pp. 198–218. Cambridge University Press, London (1986)
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Langouche, G., Yoshida, Y. (2015). Nuclear Methods to Study Defects and Impurities in Si Materials. In: Yoshida, Y., Langouche, G. (eds) Defects and Impurities in Silicon Materials. Lecture Notes in Physics, vol 916. Springer, Tokyo. https://doi.org/10.1007/978-4-431-55800-2_8
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