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High Vacuum Growth and Processing Systems

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Molecular Beam Epitaxy

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 7))

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Abstract

The maturity which the MBE technique has now achieved is reflected in the demand for high throughput, high yield MBE machines. A whole set of companies currently manufacture MBE-growth and MBE-related equipment that is sophisticated in design and reliable in application. Among the largest manufacturers which share the major part of the world market, the following six may be listed: ISA RIBER and VG SEMICON in Europe, VARIAN/TFTD and PERKIN-ELMER in the USA, and ANELVA and ULVAC in Japan.

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Author information

Authors and Affiliations

  1. Institute of Physics, Polish Academy of Sciences, al. Lotnikow 46, PL-02-668, Warszawa, Poland

    Dr. Marian A. Herman

  2. Institut für Experimentalphysik, Johannes-Kepler-Universität, A-4040, Linz/Auhof, Austria

    Dr. Helmut Sitter

Authors
  1. Dr. Marian A. Herman
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  2. Dr. Helmut Sitter
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© 1989 Springer-Verlag Berlin Heidelberg

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Herman, M.A., Sitter, H. (1989). High Vacuum Growth and Processing Systems. In: Molecular Beam Epitaxy. Springer Series in Materials Science, vol 7. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-97098-6_3

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  • DOI: https://doi.org/10.1007/978-3-642-97098-6_3

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-97100-6

  • Online ISBN: 978-3-642-97098-6

  • eBook Packages: Springer Book Archive

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