Molecular Beam Epitaxy

Fundamentals and Current Status

  • Marian A. Herman
  • Helmut Sitter

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 7)

Table of contents

  1. Front Matter
    Pages I-XII
  2. Background Information

    1. Marian A. Herman, Helmut Sitter
      Pages 1-28
  3. Technological Equipment

    1. Marian A. Herman, Helmut Sitter
      Pages 29-72
    2. Marian A. Herman, Helmut Sitter
      Pages 73-119
  4. Characterization Methods

    1. Marian A. Herman, Helmut Sitter
      Pages 120-158
    2. Marian A. Herman, Helmut Sitter
      Pages 159-214
  5. MBE Growth Processes

    1. Marian A. Herman, Helmut Sitter
      Pages 215-277
    2. Marian A. Herman, Helmut Sitter
      Pages 278-340
  6. Conclusion

    1. Marian A. Herman, Helmut Sitter
      Pages 341-350
  7. Back Matter
    Pages 351-382

About this book

Keywords

crystallization epitaxy film semiconductor silicon superlattice surface thin films

Authors and affiliations

  • Marian A. Herman
    • 1
  • Helmut Sitter
    • 2
  1. 1.Institute of PhysicsPolish Academy of SciencesWarszawaPoland
  2. 2.Institut für ExperimentalphysikJohannes-Kepler-UniversitätLinz/AuhofAustria

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-97098-6
  • Copyright Information Springer-Verlag Berlin Heidelberg 1989
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-97100-6
  • Online ISBN 978-3-642-97098-6
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • About this book