Abstract
The aerostatic bearing is a crucial element for ultra-precision machine tools, and its stiffness should be as high as possible. To obtain an infinite bearing stiffness, we propose a new type of active restrictor. Differing from conventional inflow passive and active restrictors [1], the proposed restrictor controls the air volume exhausted from the bearing surface. Therefore, we have called this active restrictor an exhaust-control restrictor (ECR). Main advantage of the ECR is its stability for the occurrence of pneumatic hammer.
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Reference
Mizumoto, H., et al.: Zero-compliance aerostatic bearing for an ultra-precision machine. Precision Engineering 12 (1990) 75–80.
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© 1991 Springer-Verlag Berlin, Heidelberg
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Mizumoto, H., Matsubara, T., Yamamoto, H., Okuno, K., Yabuya, M. (1991). An Infinite-stiffness Aerostatic Bearing with an Exhaust-control Restrictor. In: Seyfried, P., Kunzmann, H., McKeown, P., Weck, M. (eds) Progress in Precision Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84494-2_35
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DOI: https://doi.org/10.1007/978-3-642-84494-2_35
Publisher Name: Springer, Berlin, Heidelberg
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