Skip to main content
SpringerLink
Log in

Secondary Ion Mass Spectrometer with Liquid Metal Field Ion Source and Quadrupole Mass Analyzer

  • Conference paper
Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

  • 293 Accesses

Abstract

An ultra-high vacuum secondary ion mass spectrometer has been assembled from commercially available components. By doing this, the cost has been held to around $100,000.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. L.W. Swanson et al., J. Vac. Soi., Technol. 16 (1979) 1864

    Article  ADS  Google Scholar 

  2. Ion gun manufactured by FEI Inc., 2575 Cathryn, Hillsboro, OR 97124

    Google Scholar 

  3. J. Orloff and L.W. Swanson, J. Van. Soi, Technol. 19 (1981) 1149

    Article  ADS  Google Scholar 

  4. J. Puretz, J. Orloff, and L. Swanson, SPIE Vol. 471: Electron Beam, X-Ray and Ion Beam Techniques for Submicrometer Lithography III (1984) 38–76.

    Google Scholar 

  5. D.G. Welkie and R.L. Gerlach, in SIMS IV, (1984) P. 317

    Google Scholar 

  6. Non-miniaturized electron impact gas ion sources are described by R.M. Khan and J.M. Schroeer, Rev. Soi. Instr. 42 (1971), 1348, and J.-H. Wang et al., SIMS IV (1984) p. 130.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, Illinois State University, Normal, IL, 61761, USA

    J. M. Schroeer

  2. Oregon Graduate Center, 19600 N.W. von Neumann Rd., Beaverton, OR, 97006, USA

    J. Puretz

Authors
  1. J. M. Schroeer
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Puretz
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  2. Chemistry Division, Naval Research Laboratory, 20375, Washington, DC, USA

    Richard J. Colton

  3. Center for Analytical Chemistry, National Bureau of Standards, 20899, Gaithersburg, MD, USA

    David S. Simons

  4. Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

Rights and permissions

Reprints and permissions

Copyright information

© 1986 Springer-Verlag Berlin Heidelberg

About this paper

Cite this paper

Schroeer, J.M., Puretz, J. (1986). Secondary Ion Mass Spectrometer with Liquid Metal Field Ion Source and Quadrupole Mass Analyzer. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_33

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-82724-2_33

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation