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Post-Ionization of Sputtered Particles: A Brief Review

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Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

Abstract

Definition of terms:

α+ : The fraction of sputtered particles of element Me in the post-ionizing volume in the Me+ state.

T: The overall transmission including estimates on losses due to the fact that only a fraction of the sputtered particles is in the post-ionizing volume.

α × T : This is the total useful yield, i.e., the fraction of ions detected for a monoisotopic element per sputtered atom. Not included are electronic gating losses reducing the useful yield by a factor of 10 to 100 in SIMS, e-beam and thermal post ionization.

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© 1986 Springer-Verlag Berlin Heidelberg

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Reuter, W. (1986). Post-Ionization of Sputtered Particles: A Brief Review. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_21

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  • DOI: https://doi.org/10.1007/978-3-642-82724-2_21

  • Publisher Name: Springer, Berlin, Heidelberg

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