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Conceptual Design of Micro-Electro-Mechanical Systems

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Micro System Technologies 90

Abstract

We introduce a new conceptual-design methodology for the qualitative-motion synthesis of micro-electro-mechanical systems (MEMS). The approach abstracts the functionality of MEMS building blocks as matrices and allows for the symbolic synthesis of systems via matrix operations. This work is an extension of research on conceptual design of machines and mechanisms using qualitative reasoning and artificial intelligence. The fundamental motivation is to extract the logical steps involved in the creative design so that it is possible to trace the design process using computers.

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References

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© 1990 Springer-Verlag Berlin Heidelberg

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Crary, S., Kota, S. (1990). Conceptual Design of Micro-Electro-Mechanical Systems. In: Reichl, H. (eds) Micro System Technologies 90. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-45678-7_3

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  • DOI: https://doi.org/10.1007/978-3-642-45678-7_3

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-45680-0

  • Online ISBN: 978-3-642-45678-7

  • eBook Packages: Springer Book Archive

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