Abstract
Micro systems have become possible as a result of the fast evolution of VLSI technology. Modern (BI)CMOS technology allows complete systems to be integrated on a single chip while new packaging technologies allow the use of micropattern techniques also on multichip carriers. The same micropattern techniques can also be used for designing micromechanical structures as well as silicon sensors possibly with inclusion of signal conditioning, conversion and interpretation circuitry.
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© 1990 Springer-Verlag Berlin Heidelberg
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De Man, H. (1990). Microsystems: A Challenge for CAD Development. In: Reichl, H. (eds) Micro System Technologies 90. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-45678-7_1
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DOI: https://doi.org/10.1007/978-3-642-45678-7_1
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-45680-0
Online ISBN: 978-3-642-45678-7
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