Abstract
Nanotribology and nanomechanics studies are needed to develop a fundamental understanding of interfacial phenomena on a small scale and to study interfacial phenomena in micro-/nanoelectromechanical systems (MEMS/NEMS), magnetic storage devices, and other applications. Friction and wear of lightly loaded micro-/nanocomponents are highly dependent on surface interactions (few atomic layers). These structures are generally coated with molecularly thin films. Nanotribology and nanomechanics studies are also valuable in the fundamental understanding of interfacial phenomena in macrostructures and provide a bridge between science and engineering. An atomic force microscope (AFM) tip is used to simulate a single-asperity contact with a solid or lubricated surface. AFMs are used to study the various tribological phenomena, which include surface roughness, adhesion, friction, scratching, wear, detection of material transfer, and boundary lubrication. In situ surface characterization of local deformation of materials and thin coatings can be carried out using a tensile stage inside an AFM. Mechanical properties such as hardness, Youngʼs modulus of elasticity, and creep/relaxation behavior can be determined on micro- to picoscales using a depth-sensing indentation system in an AFM. Localized surface elasticity and viscoelastic mapping of near-surface regions can be obtained with nanoscale lateral resolution. Finally, an AFM can be used for nanofabrication/nanomachining.
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Abbreviations
- A/D:
-
analog-to-digital
- AC:
-
alternating-current
- AC:
-
amorphous carbon
- AFAM:
-
atomic force acoustic microscopy
- AFM:
-
atomic force microscope
- AFM:
-
atomic force microscopy
- BDCS:
-
biphenyldimethylchlorosilane
- BPT:
-
biphenyl-4-thiol
- BPTC:
-
cross-linked BPT
- DC:
-
direct-current
- DI:
-
deionized
- DI:
-
digital instrument
- DLC:
-
diamondlike carbon
- FESP:
-
force modulation etched Si probe
- FFM:
-
friction force microscope
- FFM:
-
friction force microscopy
- HDT:
-
hexadecanethiol
- HOPG:
-
highly oriented pyrolytic graphite
- LB:
-
Langmuir–Blodgett
- LFM:
-
lateral force microscope
- LFM:
-
lateral force microscopy
- ME:
-
metal-evaporated
- MEMS:
-
microelectromechanical system
- MP:
-
metal particle
- MWNT:
-
multiwall nanotube
- NEMS:
-
nanoelectromechanical system
- PECVD:
-
plasma-enhanced chemical vapor deposition
- PET:
-
poly(ethyleneterephthalate)
- PFPE:
-
perfluoropolyether
- PZT:
-
lead zirconate titanate
- RH:
-
relative humidity
- RMS:
-
root mean square
- SAM:
-
scanning acoustic microscopy
- SAM:
-
self-assembled monolayer
- SEM:
-
scanning electron microscope
- SEM:
-
scanning electron microscopy
- SFA:
-
surface forces apparatus
- STM:
-
scanning tunneling microscope
- STM:
-
scanning tunneling microscopy
- TEM:
-
transmission electron microscope
- TEM:
-
transmission electron microscopy
- TESP:
-
tapping mode etched silicon probe
- TM:
-
tapping mode
- TR:
-
torsional resonance
- Z-DOL:
-
perfluoropolyether
References
I.L. Singer, H.M. Pollock (Eds.): Fundamentals of Friction: Macroscopic and Microscopic Processes, NATO ASI Ser. E, Vol. 220 (Kluwer, Dordrecht 1992)
H.J. Güntherodt, D. Anselmetti: Forces in Scanning Probe Methods, NATO ASI Ser. E, Vol. 286 (Kluwer, Dordrecht 1995)
B.N.J. Persson, E. Tosatti: Physics of Sliding Friction, NATO ASI Ser. E, Vol. 311 (Kluwer, Dordrecht 1996)
B. Bhushan: Micro/Nanotribology and its Applications, NATO ASI Ser. E, Vol. 330 (Kluwer, Dordrecht 1997)
B. Bhushan: Handbook of Micro/Nanotribology, 2nd edn. (CRC, Boca Raton 1999)
B. Bhushan: Principles and Applications of Tribology (Wiley, New York 1999)
B. Bhushan: Nanoscale tribophysics and tribomechanics, Wear 225–229, 465–492 (1999)
B. Bhushan: Modern Tribology Handbook, Vol. 1: Principles of Tribology (CRC, Boca Raton 2001)
B. Bhushan: Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/ Nanoscales, NATO Sci. Ser. II, Vol. 10 (Kluwer, Dordrecht 2001)
B. Bhushan: Nano- to microscale wear and mechanical characterization studies using scanning probe microscopy, Wear 251, 1105–1123 (2001)
B. Bhushan: Introduction to Tribology (Wiley, New York 2002)
B. Bhushan: Nanotribology and nanomechanics, Wear 259, 1507–1531 (2005)
B. Bhushan: Nanotribology and Nanomechanics – An Introduction, 2nd edn. (Springer, Berlin Heidelberg 2008)
B. Bhushan, J.N. Israelachvili, U. Landman: Nanotribology: Friction, wear and lubrication at the atomic scale, Nature 374, 607–616 (1995)
B. Bhushan: Tribology and Mechanics of Magnetic Storage Devices, 2nd edn. (Springer, New York 1996)
B. Bhushan: Tribology Issues and Opportunities in MEMS (Kluwer, Dordrecht 1998)
B. Bhushan: Wear and mechanical characterisation on micro- to picoscales using AFM, Int. Mater. Rev. 44, 105–117 (1999)
B. Bhushan: Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction (invited), J. Vac. Sci. Technol. B 21, 2262–2296 (2003)
B. Bhushan: Nanotribology, nanomechanics and nanomaterials characterization, Philos. Trans. R. Soc. A 366, 1351–1381 (2008)
B. Bhushan, A.V. Kulkarni, V.N. Koinkar, M. Boehm, L. Odoni, C. Martelet, M. Belin: Microtribological characterization of self-assembled and Langmuir–Blodgett monolayers by atomic and friction force microscopy, Langmuir 11, 3189–3198 (1995)
B. Bhushan, H. Fuchs, S. Hosaka (Eds.): Applied Scanning Probe Methods (Springer, Berlin Heidelberg 2004)
B. Bhushan, H. Fuchs, S. Kawata (Eds.): Applied Scanning Probe Methods V – Scanning Probe Microscopy Techniques (Springer, Berlin Heidelberg 2007)
B. Bhushan, H. Fuchs, M. Tomitori (Eds.): Applied Scanning Probe Methods VIII – Scanning Probe Microscopy Techniques (Springer, Berlin Heidelberg 2008)
B. Bhushan, H. Fuchs, M. Tomitori (Eds.): Applied Scanning Probe Methods IX – Characterization (Springer, Berlin Heidelberg 2008)
B. Bhushan, H. Fuchs, M. Tomitori (Eds.): Applied Scanning Probe Methods X – Biomimetics and Industrial Applications (Springer, Berlin Heidelberg 2008)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods II – Scanning Probe Microscopy Techniques (Springer, Berlin Heidelberg 2006)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods III – Characterization (Springer, Berlin Heidelberg 2006)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods IV – Industrial Applications (Springer, Berlin Heidelberg 2006)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods VII – Biomimetics and Industrial Applications (Springer, Berlin Heidelberg 2007)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods XI – Scanning Probe Microscopy Techniques (Springer, Berlin Heidelberg 2009)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods XII – Characterization (Springer, Berlin Heidelberg 2009)
B. Bhushan, H. Fuchs (Eds.): Applied Scanning Probe Methods XIII – Biomimetics and Industrial Applications (Springer, Berlin Heidelberg 2009)
B. Bhushan, S. Kawata (Eds.): Applied Scanning Probe Methods VI – Characterization (Springer, Berlin Heidelberg 2007)
G. Binnig, C.F. Quate, C. Gerber: Atomic force microscopy, Phys. Rev. Lett. 56, 930–933 (1986)
G. Binnig, C. Gerber, E. Stoll, T.R. Albrecht, C.F. Quate: Atomic resolution with atomic force microscope, Europhys. Lett. 3, 1281–1286 (1987)
C.M. Mate, G.M. McClelland, R. Erlandsson, S. Chiang: Atomic-scale friction of a tungsten tip on a graphite surface, Phys. Rev. Lett. 59, 1942–1945 (1987)
B. Bhushan, J. Ruan: Atomic-scale friction measurements using friction force microscopy: Part II – Application to magnetic media, ASME J. Tribol. 116, 389–396 (1994)
J. Ruan, B. Bhushan: Atomic-scale friction measurements using friction force microscopy: Part I – General principles and new measurement techniques, ASME J. Tribol. 116, 378–388 (1994)
J. Ruan, B. Bhushan: Atomic-scale and microscale friction of graphite and diamond using friction force microscopy, J. Appl. Phys. 76, 5022–5035 (1994)
J. Ruan, B. Bhushan: Frictional behavior of highly oriented pyrolytic graphite, J. Appl. Phys. 76, 8117–8120 (1994)
B. Bhushan, V.N. Koinkar, J. Ruan: Microtribology of magnetic media, Proc. Inst. Mech. Eng. J: J. Eng. Tribol. 208, 17–29 (1994)
B. Bhushan, A.V. Kulkarni: Effect of normal load on microscale friction measurements, Thin Solid Films 278, 49–56 (1996)
B. Bhushan, S. Sundararajan: Micro/nanoscale friction and wear mechanisms of thin films using atomic force and friction force microscopy, Acta Mater. 46, 3793–3804 (1998)
V. Scherer, W. Arnold, B. Bhushan: Active friction control using ultrasonic vibration. In: Tribology Issues and Opportunities in MEMS, ed. by B. Bhushan (Kluwer, Dordrecht 1998) pp. 463–469
V. Scherer, W. Arnold, B. Bhushan: Lateral force microscopy using acoustic friction force microscopy, Surf. Interface Anal. 27, 578–587 (1999)
M. Reinstädtler, U. Rabe, V. Scherer, U. Hartmann, A. Goldade, B. Bhushan, W. Arnold: On the nanoscale measurement of friction using atomicforce microscope cantilever torsional resonances, Appl. Phys. Lett. 82, 2604–2606 (2003)
M. Reinstädtler, U. Rabe, A. Goldade, B. Bhushan, W. Arnold: Investigating ultra-thin lubricant layers using resonant friction force microscopy, Tribol. Int. 38, 533–541 (2005)
M. Reinstädtler, T. Kasai, U. Rabe, B. Bhushan, W. Arnold: Imaging and measurement of elasticity and friction using the TR mode, J. Phys. D 38, R269–R282 (2005)
B. Bhushan, T. Kasai: A surface topography independent friction measurement technique using torsional resonance mode in an AFM, Nanotechnology 15, 923–935 (2004)
N.S. Tambe, B. Bhushan: A new atomic force microscopy based technique for studying nanoscale friction at high sliding velocities, J. Phys. D: Appl. Phys. 38, 764–773 (2005)
V.N. Koinkar, B. Bhushan: Micro/nanoscale studies of boundary layers of liquid lubricants formagnetic disks, J. Appl. Phys. 79, 8071–8075 (1996)
V.N. Koinkar, B. Bhushan: Microtribological studies of unlubricated and lubricated surfaces using atomic force/friction force microscopy, J. Vac. Sci. Technol. 14, 2378–2391 (1996)
B. Bhushan, H. Liu: Nanotribological properties and mechanisms of alkylthiol and biphenyl thiol self-assembled monolayers studied by AFM, Phys. Rev. B 63, 245412-1–245412-11 (2001)
H. Liu, B. Bhushan: Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFM, Ultramicroscopy 97, 321–340 (2003)
B. Bhushan, T. Kasai, G. Kulik, L. Barbieri, P. Hoffmann: AFM study of perfluorosilane and alkylsilane self-assembled monolayers for antistiction in MEMS/NEMS, Ultramicroscopy 105, 176–188 (2005)
B. Bhushan, V.N. Koinkar: Tribological studies of silicon for magnetic recording applications, J. Appl. Phys. 75, 5741–5746 (1994)
V.N. Koinkar, B. Bhushan: Microtribological studies of Al2O3-TiC, polycrystalline and single-crystal Mn-Zn ferrite and SiC head slider materials, Wear 202, 110–122 (1996)
V.N. Koinkar, B. Bhushan: Microtribological properties of hard amorphous carbon protective coatings for thin film magnetic disks and heads, J. Eng. Tribol. 211, 365–372 (1997)
S. Sundararajan, B. Bhushan: Development of a continuous microscratch technique in an atomic force microscope and its application to study scratch resistance of ultra-thin hard amorphous carbon coatings, J. Mater. Res. 16, 75–84 (2001)
J. Ruan, B. Bhushan: Nanoindentation studies of fullerene films using atomic force microscopy, J. Mater. Res. 8, 3019–3022 (1993)
B. Bhushan, A.V. Kulkarni, W. Bonin, J.T. Wyrobek: Nano/picoindentation measurement using a capacitance transducer system in atomic force microscopy, Philos. Mag. 74, 1117–1128 (1996)
B. Bhushan, V.N. Koinkar: Nanoindentation hardness measurements using atomic force microscopy, Appl. Phys. Lett. 64, 1653–1655 (1994)
B. Bhushan, X. Li: Nanomechanical characterisation of solid surfaces and thin films, Int. Mater. Rev. 48, 125–164 (2003)
P. Maivald, H.J. Butt, S.A.C. Gould, C.B. Prater, B. Drake, J.A. Gurley, V.B. Elings, P.K. Hansma: Using force modulation to image surface elasticities with the atomic force microscope, Nanotechnology 2, 103–106 (1991)
B. Anczykowski, D. Kruger, K.L. Babcock, H. Fuchs: Basic properties of dynamic force microscopy with the scanning force microscope in experiment and simulation, Ultramicroscopy 66, 251–259 (1996)
D. DeVecchio, B. Bhushan: Localized surface elasticity measurements using an atomic force microscope, Rev. Sci. Instrum. 68, 4498–4505 (1997)
V. Scherer, B. Bhushan, U. Rabe, W. Arnold: Local elasticity and lubrication measurements using atomic force and friction force microscopy at ultrasonic frequencies, IEEE Trans. Magn. 33, 4077–4079 (1997)
S. Amelio, A.V. Goldade, U. Rabe, V. Scherer, B. Bhushan, W. Arnold: Measurements of elastic properties of ultra-thin diamond-like carbon coatings using atomic force acoustic microscopy, Thin Solid Films 392, 75–84 (2001)
W.W. Scott, B. Bhushan: Use of phase imaging in atomic force microscopy for measurement of viscoelastic contrast in polymer nanocomposites and molecularly-thick lubricant films, Ultramicroscopy 97, 151–169 (2003)
B. Bhushan, J. Qi: Phase contrast imaging of nanocomposites and molecularly thick lubricant films in magnetic media, Nanotechnology 14, 886–895 (2003)
T. Kasai, B. Bhushan, L. Huang, C. Su: Topography and phase imaging using the torsional resonance mode, Nanotechnology 15, 731–742 (2004)
N. Chen, B. Bhushan: Morphological, nanomechanical and cellular structural characterization of human hair and conditioner distribution using torsional resonance mode in an AFM, J. Microsc. 220, 96–112 (2005)
M.S. Bobji, B. Bhushan: Atomic force microscopic study of the micro-cracking of magnetic thin films under tension, Scr. Mater. 44, 37–42 (2001)
M.S. Bobji, B. Bhushan: In-situ microscopic surface characterization studies of polymeric thin films during tensile deformation using atomic force microscopy, J. Mater. Res. 16, 844–855 (2001)
N. Tambe, B. Bhushan: In situ study of nanocracking of multilayered magnetic tapes under monotonic and fatigue loading using an AFM, Ultramicroscopy 100, 359–373 (2004)
M. Palacio, B. Bhushan: Normal and lateral force calibration techniques for AFM cantilevers, (submitted for publication) UPDATE WITH JOURNAL
B. Bhushan, T. Kasai, C.V. Nguyen, M. Meyyappan: Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures, Microsyst. Technol. 10, 633–639 (2004)
B. Bhushan: Micro/nanotribology and Its applications to magnetic storage devices and MEMS, Tribol. Int. 28, 85–95 (1995)
D. DeVecchio, B. Bhushan: Use of a nanoscale Kelvin probe for detecting wear precursors, Rev. Sci. Instrum. 69, 3618–3624 (1998)
B. Bhushan, A.V. Goldade: Measurements and analysis of surface potential change during wear of single crystal silicon (100) at ultralow loads using Kelvin probe microscopy, Appl. Surf. Sci. 157, 373–381 (2000)
B. Bhushan, A.V. Goldade: Kelvin probe microscopy measurements of surface potential change under wear at low loads, Wear 244, 104–117 (2000)
H.U. Krotil, T. Stifter, H. Waschipky, K. Weishaupt, S. Hild, O. Marti: Pulse force mode: A new method for the investigation of surface properties, Surf. Interface Anal. 27, 336–340 (1999)
U. Rabe, K. Janser, W. Arnold: Vibrations of free and surface-coupled atomic force microscope cantilevers: Theory and experiment, Rev. Sci. Instrum. 67, 3281–3293 (1996)
J. Tamayo, R. Garcia: Deformation, contact time, and phase contrast in tapping mode scanning force microscopy, Langmuir 12, 4430–4435 (1996)
R. Garcia, J. Tamayo, M. Calleja, F. Garcia: Phase contrast in tapping-mode scanning force microscopy, Appl. Phys. A 66, 309–312 (1998)
Y. Song, B. Bhushan: Quantitative extraction of inplane surface properties using torsional resonance mode in atomic force microscopy, J. Appl. Phys. 87, 083533 (2005)
B. Bhushan, J. Ruan, B.K. Gupta: A scanning tunnelling microscopy study of fullerene films, J. Phys. D: Appl. Phys. 26, 1319–1322 (1993)
G.A. Tomlinson: A molecular theory of friction, Philos. Mag. Ser. 7, 905–939 (1929)
D. Tomanek, W. Zhong, H. Thomas: Calculation of an atomically modulated friction force in atomic forcemicroscopy, Europhys. Lett. 15, 887–892 (1991)
E. Meyer, R. Overney, R. Lüthi, D. Brodbeck, L. Howald, J. Frommer, H.J. Güntherodt, O. Wolter, M. Fujihira, T. Takano, Y. Gotoh: Friction force microscopy of mixed Langmuir–Blodgett films, Thin Solid Films 220, 132–137 (1992)
C.D. Frisbie, L.F. Rozsnyai, A. Noy, M.S. Wrighton, C.M. Lieber: Functional group imaging by chemical force microscopy, Science 265, 2071–2074 (1994)
V.N. Koinkar, B. Bhushan: Effect of scan size and surface roughness on microscale friction measurements, J. Appl. Phys. 81, 2472–2479 (1997)
S. Sundararajan, B. Bhushan: Topography-induced contributions to friction forces measured using an atomic force/friction force microscope, J. Appl. Phys. 88, 4825–4831 (2000)
B. Bhushan, G.S. Blackman: Atomic force microscopy of magnetic rigid disks and sliders and its applications to tribology, ASME J. Tribol. 113, 452–458 (1991)
K. Yamanaka, E. Tomita: Lateral force modulation atomic force microscope for selective imaging of friction forces, Jpn. J. Appl. Phys. 34, 2879–2882 (1995)
Z. Tao, B. Bhushan: A new technique for studying nanoscale friction at sliding velocities up to 200 mm/s using atomic force microscope, Rev. Sci. Instrum. 71, 103705 (2006)
O. Marti, H.-U. Krotil: Dynamic friction measurement with the scanning force microscope. In: Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales, NATO Sci. Ser. II, Vol. 10, ed. by B. Bhushan (Kluwer, Dordrecht 2001) pp. 121–135
N.S. Tambe, B. Bhushan: Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants, Nanotechnology 15, 1561–1570 (2004)
N.S. Tambe, B. Bhushan: Friction model for the velocity dependence of nanoscale friction, Nanotechnology 16, 2309–2324 (2005)
N.S. Tambe, B. Bhushan: Durability studies of micro/nanoelectromechanical system materials, coatings, and lubricants at high sliding velocities (up to 10 mm/s) using a modified atomic force microscope, J. Vac. Sci. Technol. A 23, 830–835 (2005)
N.S. Tambe, B. Bhushan: Identifying materials with low friction and adhesion for nanotechnology applications, Appl. Phys. Lett 86, 061906-1–061906-3 (2005)
Z. Tao, B. Bhushan: Velocity dependence and rest time effect in nanoscale friction of ultrathin films at high sliding velocities, J. Vac. Sci. Technol. A 25, 1267–1274 (2007)
O. Zwörner, H. Hölscher, U.D. Schwarz, R. Wiesendanger: The velocity dependence of frictional forces in point-contact friction, Appl. Phys. A 66, S263–S267 (1998)
E. Gnecco, R. Bennewitz, T. Gyalog, C. Loppacher, M. Bammerlin, E. Meyer, H.J. Güntherodt: Velocity dependence of atomic friction, Phys. Rev. Lett. 84, 1172–1175 (2000)
J.S. Helman, W. Baltensperger, J.A. Holyst: Simple-model for dry friction, Phys. Rev. B 49, 3831–3838 (1994)
C. Fusco, A. Fasolino: Velocity dependence of atomic-scale friction: A comparative study of the one- and two-dimensional Tomlinson model, Phys. Rev. B 71, 045413 (2005)
N.S. Tambe, B. Bhushan: Nanoscale friction mapping, Appl. Phys. Lett. 86, 193102-1–193102-3 (2005)
N.S. Tambe, B. Bhushan: Nanoscale friction and wear maps, Philos. Trans. R. Soc. A 366, 1405–1424 (2008)
N.S. Tambe, B. Bhushan: Nanoscale frictioninduced phase transformation of diamond-like carbon, Scr. Mater. 52, 751–755 (2005)
S.C. Lim, M.F. Ashby: Wear mechanism maps, Acta Metall. 35, 1–24 (1987)
S.C. Lim, M.F. Ashby, J.H. Brunton: Wear-rate transitions and their relationship to wear mechanisms, Acta Metall. 35, 1343–1348 (1987)
N.S. Tambe, B. Bhushan: Nanowear mapping: A novel atomic force microscopy based approach for studying nanoscale wear at high sliding velocities, Tribol. Lett. 20, 83–90 (2005)
B. Bhushan, C. Dandavate: Thin-film friction and adhesion studies using atomic force microscop, J. Appl. Phys. 87, 1201–1210 (2000)
T. Stifter, O. Marti, B. Bhushan: Theoretical investigation of the distance dependence of capillary and van der Waals forces in scanning probe microscopy, Phys. Rev. B 62, 13667–13673 (2000)
U.D. Schwarz, O. Zwörner, P. Köster, R. Wiesendanger: Friction force spectroscopy in the lowload regime with well-defined tips. In: Micro/Nanotribology and Its Applications, ed. by B. Bhushan (Kluwer, Dordrecht 1997) pp. 233–238
B. Bhushan, H. Liu, S.M. Hsu: Adhesion and friction studies of silicon and hydrophobic and low friction films and investigation of scale effects, ASME J. Tribol. 126, 583–590 (2004)
B. Bhushan, B.K. Gupta: Handbook of Tribology: Materials, Coatings and Surface Treatments (McGraw-Hill, New York 1991), reprinted by Krieger, Malabar (1997)
B. Bhushan, S. Venkatesan: Mechanical and tribological properties of silicon for micromechanical applications: A review, Adv. Info. Storage Syst. 5, 211–239 (1993)
Anonymous: Properties of Silicon, EMIS Data Reviews Series No. 4. INSPEC, Institution of Electrical Engineers, London. See also Anonymous, MEMS Materials Database, http://www.memsnet.org/material/ (2002)
J.E. Field (Ed.): The Properties of Natural and Synthetic Diamond (Academic, London 1992)
B. Bhushan: Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: Recent developments, Diam. Relat. Mater. 8, 1985–2015 (1999)
Anonymous: The Industrial Graphite Engineering Handbook (National Carbon Company, New York 1959)
M. Nosonovsky, B. Bhushan: Scale effects in dry friction during multiple-asperity contact, ASME J. Tribol. 127, 37–46 (2005)
H. Liu, B. Bhushan: Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatus, J. Vac. Sci. Technol. A 21, 1528–1538 (2003)
B. Bhushan, M. Nosonovsky: Comprehensive model for scale effects in friction due to adhesion and two- and three-body deformation (plowing), Acta Mater. 52, 2461–2474 (2004)
B. Bhushan, M. Nosonovsky: Scale effects in dry and wet friction, wear, and interface temperature, Nanotechnology 15, 749–761 (2004)
B. Bhushan, M. Nosonovsky: Scale effects in friction using strain gradient plasticity and dislocationassisted sliding (microslip), Acta Mater. 51, 4331–4345 (2003)
V.N. Koinkar, B. Bhushan: Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy, J. Mater. Res. 12, 3219–3224 (1997)
X. Zhao, B. Bhushan: Material removal mechanism of single-crystal silicon on nanoscale and at ultralow loads, Wear 223, 66–78 (1998)
B. Bhushan, P.S. Mokashi, T. Ma: A new technique to measure Poissonʼs ratio of ultrathin polymeric films using atomic force microscopy, Rev. Sci. Instrum. 74, 1043–1047 (2003)
A.V. Kulkarni, B. Bhushan: Nanoscale mechanical property measurements using modified atomic forcemicroscopy, Thin Solid Films 290/291, 206–210 (1996)
A.V. Kulkarni, B. Bhushan: Nano/picoindentation measurements on single-crystal aluminum using modified atomic force microscopy, Mater. Lett. 29, 221–227 (1996)
A.V. Kulkarni, B. Bhushan: Nanoindentation measurement of amorphous carbon coatings, J. Mater. Res. 12, 2707–2714 (1997)
N.A. Fleck, G.M. Muller, M.F. Ashby, J.W. Hutchinson: Strain gradient plasticity: Theory and experiment, Acta Metall. Mater. 42, 475–487 (1994)
W.D. Nix, H. Gao: Indentation size effects in crystalline materials: A law for strain gradient plasticity, J. Mech. Phys. Solids 46, 411–425 (1998)
W.B. Li, J.L. Henshall, R.M. Hooper, K.E. Easterling: The mechanism of indentation creep, Acta Metall. Mater. 39, 3099–3110 (1991)
F.P. Bowden, D. Tabor: The Friction and Lubrication of Solids (Clarendon, Oxford 1950)
Z. Tao, B. Bhushan: Bonding, degradation, and environmental effects on novel perfluoropolyether lubricants, Wear 259, 1352–1361 (2005)
B. Bhushan, M. Cichomski, Z. Tao, N.T. Tran, T. Ethen, C. Merton, R.E. Jewett: Nanotribological characterization and lubricant degradation studies of metal-film magnetic tapes using novel lubricants, ASME J. Tribol. 129, 621–627 (2007)
M. Palacio, B. Bhushan: Surface potential and resistance measurements for detecting wear of chemically-bonded and unbonded molecularly-thick perfluoropolyether lubricant films using atomic force microscopy, J. Colloid Interface Sci. 315, 261–269 (2007)
M. Palacio, B. Bhushan: Wear detection of candidate MEMS/NEMS lubricant films using atomic force microscopy-based surface potential measurements, Scr. Mater. 57, 821–824 (2007)
B. Bhushan, M. Palacio, B. Kinzig: AFM-based nanotribological and electrical characterization of ultrathin wear-resistant ionic liquid films, J. Colloid Interface Sci. 317, 275–287 (2008)
M. Palacio, B. Bhushan: Ultrathin wear-resistant ionic liquid films for novel MEMS/NEMS applications, Adv. Mater. 20, 1194–1198 (2008)
M. Palacio, B. Bhushan: Molecularly thick dicationic ionic liquid films for nanolubrication, J. Vac. Sci. Technol. A 27(4), 986–995 (2009)
B. Bhushan, D. Hansford, K.K. Lee: Surface modification of silicon and polymethylsiloxane surfaces with vapor-phase-deposited ultrathin fluorosilane films for biomedical nanodevices, J. Vac. Sci. Technol. A 24, 1197–1202 (2006)
H. Liu, B. Bhushan, W. Eck, V. Stadtler: Investigation of the adhesion, friction, and wear properties of biphenyl thiol self-assembled monolayers by atomic force microscopy, J. Vac. Sci. Technol. A 19, 1234–1240 (2001)
H. Liu, B. Bhushan: Investigation of nanotribological properties of self-assembled monolayers with alkyl and biphenyl spacer chains, Ultramicroscopy 91, 185–202 (2002)
T. Kasai, B. Bhushan, G. Kulik, L. Barbieri, P. Hoffman: Micro-/nanotribological study of perfluorosilane SAMs for antistiction and low wear, J. Vac. Sci. Technol. B 23, 995–1003 (2005)
K.K. Lee, B. Bhushan, D. Hansford: Nanotribological characterization of fluoropolymer thin films for biomedical micro-/nanoelectromechemical systems applications, J. Vac. Sci. Technol. A 23, 804–810 (2005)
N.S. Tambe, B. Bhushan: Nanotribological characterization of self assembled monolayers deposited on silicon and aluminum substrates, Nanotechnology 16, 1549–1558 (2005)
Z. Tao, B. Bhushan: Degradation mechanisms and environmental effects on perfluoropolyether, self-assembled monolayers, and diamondlike carbon films, Langmuir 21, 2391–2399 (2005)
E. Hoque, J.A. DeRose, P. Hoffmann, H.J. Mathieu, B. Bhushan, M. Cichomski: Phosphonate self-assembled monolayers on aluminum surfaces, J. Chem. Phys. 124, 174710 (2006)
E. Hoque, J.A. DeRose, G. Kulik, P. Hoffmann, H.J. Mathieu, B. Bhushan: Alkylphosphonate modified aluminum oxide surfaces, J. Phys. Chem. B 110, 10855–10861 (2006)
E. Hoque, J.A. DeRose, P. Hoffmann, B. Bhushan, H.J. Mathieu: Alkylperfluorosilane self-assembled monolayers on aluminum: A comparison with alkylphosphonate self-assembled monolayers, J. Phys. Chem. C 111, 3956–3962 (2007)
E. Hoque, J.A. DeRose, P. Hoffmann, B. Bhushan, H.J. Mathieu: Chemical stability of nonwetting, low adhesion self-assembled monolayer films formed by perfluoroalkylsilazation of copper, J. Chem. Phys. 126, 114706 (2007)
E. Hoque, J.A. DeRose, B. Bhushan, H.J. Mathieu: Self-assembled monolayers on aluminum and copper oxide surfaces: Surface and interface characteristics, nanotribological properties, and chemical stability. In: Applied Scanning Probe Methods IX – Characterization, ed. by B. Bhushan, H. Fuchs, M. Tomitori (Springer, Berlin Heidelberg 2008) pp. 235–281
E. Hoque, J.A. DeRose, B. Bhushan, K.W. Hipps: Low adhesion, non-wetting phosphonate self-assembled monolayer films formed on copper oxide surfaces, Ultramicroscopy 109(8), 1015–1022 (2009)
J.A. DeRose, E. Hoque, B. Bhushan, H.J. Mathieu: Characterization of perfluorodecanote self-assembled monolayers on aluminum and comparison of stability with phosphonate and siloxy self-assembled monolayers, Surf. Sci. 602, 1360–1367 (2008)
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Bhushan, B. (2010). Nanotribology, Nanomechanics, and Materials Characterization. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_28
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