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TEM study of quaternary InGaAsN/GaAs quantum well structures grown by molecular beam epitaxy

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EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany

Abstract

In this study we report on the compositional analysis of quaternary InGaAsN/GaAs quantum well (QW) structures based on transmission electron microscope (TEM) investigations accompanied by theoretical ab-initio calculations. The pronounced band gap bowing by adding nitrogen to GaAs allows to reach the telecommunication wavelength range around 1.3–1.55 µm while staying lattice matched to the GaAs substrate by incorporating In. A sample series of InxGa1−xAs1−yNy with different nominal concentrations of In and N in the range of x = 0.1 − 0.4 and y = 0.01 − 0.05, respectively, were grown by radio-frequency plasma assisted molecular beam epitaxy and has been investigated by TEM.

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© 2008 Springer-Verlag Berlin Heidelberg

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Remmele, T. et al. (2008). TEM study of quaternary InGaAsN/GaAs quantum well structures grown by molecular beam epitaxy. In: Richter, S., Schwedt, A. (eds) EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85226-1_42

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